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Substrate transfer and substrate processing apparatus

A transfer table and substrate technology, applied in transportation and packaging, semiconductor devices, electrical components, etc., can solve problems affecting panel display effect, film thickness, etc., to avoid sudden temperature drop, improve comprehensive performance, and avoid color shift. Effect

Pending Publication Date: 2022-07-12
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0005] An embodiment of the present invention provides a substrate transfer table to effectively improve the heat transfer between the substrate and the transfer table during the manufacturing process of the display panel, and make the film layer in this area thicker, which ultimately affects the display effect of the panel. The problem

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  • Substrate transfer and substrate processing apparatus
  • Substrate transfer and substrate processing apparatus
  • Substrate transfer and substrate processing apparatus

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Embodiment Construction

[0033] The following disclosure provides different implementations or examples to implement different structures of the present invention with reference to the accompanying drawings in the embodiments of the present invention. In order to simplify the present invention, the components and arrangements of specific examples are described below. In addition, examples of various specific processes and materials are provided herein, and those of ordinary skill in the art will recognize the application of other processes. All other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present invention.

[0034] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc., or The positional relationship...

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Abstract

The embodiment of the invention provides a substrate transfer table and a substrate processing device. The substrate transfer table comprises an adsorption platform, a bonding layer and an adsorption part. The bonding layer is attached to one side of the adsorption platform, the adsorption component is attached to the bonding layer, and the bonding layer is a heat insulation material layer. According to the display panel, the bonding layer is arranged to be the heat insulation material layer, when the adsorption component adsorbs and transfers the substrate, heat generated by the substrate cannot be transferred to the transfer platform, the problem that the temperature of the substrate in the area is reduced is solved, the thickness of a film layer in the area is guaranteed, and the display effect of the display panel is effectively improved.

Description

technical field [0001] The present invention relates to the technical field of manufacture of display substrates, and in particular, to a substrate transfer table and a substrate processing device. Background technique [0002] With the development of display panel manufacturing technology, people have put forward higher requirements for the display effect and comprehensive performance of the display panel and the display device. [0003] As one of the important pillar industries of the electronic information industry, the flat panel display industry is very important to the economic development of a country and region by virtue of its huge economic benefits and industrial agglomeration effect. Among them, the organic light emitting diode technology has been gradually developed, and is most likely to replace the thin film transistor display technology. Compared with traditional liquid crystal displays, organic light-emitting diode (OLED) devices have many advantages such as...

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Application Information

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IPC IPC(8): H01L21/687H01L21/677H01L51/56
CPCH01L21/68757H01L21/677H10K71/00
Inventor 不公告发明人
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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