Ultraviolet-visible microobjective optical system for wafer AOI detection
A technology of microscope objective lens and optical system, applied in the field of ultraviolet-visible microscope objective lens optical system and optical system, can solve the problems of limited detection efficiency, small field of view on the object side, image quality influence, etc., to achieve high-resolution characteristics, The effect of reducing the amount of introduction
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[0035] Example: A UV-Vis microscope objective optical system for wafer AOI inspection, such as figure 1 As shown, the object side is defined as the left side, and the image side is defined as the right side. Since the optical path is reversible, according to the reverse optical path design, the optical system of the microscope objective lens is along its optical axis direction from the object side to the image side, including the positive diopter in turn. The first lens group G1 (front group), the second lens group G2 (middle group) with positive diopter, and the third lens group G3 (rear group) with negative diopter, wherein:
[0036] The first lens group sequentially includes along its optical axis from the object side to the image side: a first lens 1 with positive refractive power, a second lens 2 with positive refractive power, and a third lens 3 with positive refractive power;
[0037]The second lens group sequentially includes along its optical axis from the object side...
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