Magnetic sensor formed on semiconductor substrate
A magnetic sensor and semiconductor technology, applied in the field of magnetic sensors, can solve the problems of inability to detect external magnetic field Hext, high current consumption, lack of sensitivity, etc.
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[0024] In FIG. 2, the parallelepiped-shaped substrate is similar to that of the prior art sensor in FIG. 1 described earlier, and is designated by reference numeral 1. The substrate consists of a CMOS integrated on its large top surface 2, a circuit combined with a magnetic sensor to make a complete magnetometer, the integrated electronic circuit is not shown in the figure.
[0025] The sensor includes a planar excitation coil 9 made on the surface 2 of the substrate 1, the coil 9 having a substantially square outer contour formed by an outer ring 90. The other turns 91 to 94 of the excitation coil 9 are concentric with the outer ring 90, are also square, and have decreasing dimensions as shown in the figure.
[0026] The ferromagnetic core 10 is usually fabricated on the excitation coil 9 by welding. The magnetic core is formed of an amorphous magnetic material. As in the case of the existing device in FIG. 1, it is usually made of commercially available non-magnetic materials. T...
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