High frequency E-type and I-type film transformer and its preparing method

A transformer and thin-film technology, applied in the field of electronics, can solve the problems of complex process, low coupling efficiency, small primary and secondary inductance, etc., and achieve the effects of solving anti-interference, easy volume reduction, and improved magnetic permeability

Inactive Publication Date: 2004-07-14
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The primary and secondary inductance is small, the coupling efficiency is low, and the process is extremely complicated

Method used

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  • High frequency E-type and I-type film transformer and its preparing method
  • High frequency E-type and I-type film transformer and its preparing method
  • High frequency E-type and I-type film transformer and its preparing method

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Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0033] Take the E-type film transformer as an example:

[0034] Substrate size: 20×20×0.4mm;

[0035] Magnetic core size: 12×9mm; winding turns ratio: 3:2;

[0036] Window size: 6×3mm;

[0037] Adopt the specific preparation technique described above of the present invention, namely:

[0038] The present invention can use mask or photolithography to make thin-film transformer directly on the ceramic base and printed circuit board, adopt the method of inclining 15 degrees and 20 degrees from the vertical direction, and plate it on the thin-film magnetic core in the way of intersecting and winding. , that is, the primary and secondary film windings are wound on the E-shaped magnetic film to form an E-shaped film transformer, which greatly increases the coupling coefficient. The structure of E-type silicon-based or ceramic-based thin-film transformers is: silver lower electrode / insulating film layer / magnetic core film / insulating film layer / upper electrode silver film, and each...

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Abstract

The present invention dicloses a film transformer and its producting process. The film transformer consists of primary winding, secondary winding and film magnetic core. The primary winding and the secondary winding are plated to the film magnetic core crossly at the angle of 15 deg and 20 deg to the horizotnal direction separately. During the manufacture, the upper and the lower electrodes are made through a mask or photoetching process; the magnetic core film is prepared through a magnetically controlled sputtering process; the insulating layer is formed through evaporating SiO2 material lump in tungsten boat; and the magnetic core film is finally oriented nanometer crystallized in vacuum and magnetic field. The film transformer is one basic magnetic electronic element and its use will promote the conversion to sheet electronic elements.

Description

technical field [0001] The invention belongs to the field of electronic technology, in particular to the preparation technology of electronic components. Background technique [0002] Thin-film transformers and related integrated devices are hot spots in international research and development in recent years. On the one hand, due to the rapid development of mobile communications and the wide application of flat-panel display systems, their development has been accelerated; The requirement of "small, light, thin, and precise" makes the research and development of thin film transformers in integrated DC / DC transformers and micro-opening power supply systems extremely active. In 1992, Tohoku University in Sendai, Japan used amorphous thin strips as textile-type film transformers. The copper wires used for textiles are 15-50 μm in diameter, and the winding turns vary from 3-30 turns. Although the inductance value is large, it is bulky and not easy to use. It belongs to thin fil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01F27/24H01F27/28H01F30/06H01F41/00
Inventor 张怀武刘颖力钟智勇贾利军
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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