Producing system of semiconductor storage and method for producing semiconductor storage
A technology for producing systems and semiconductors, applied in the fields of semiconductor devices, semiconductor/solid-state device manufacturing, semiconductor/solid-state device testing/measurement, etc., and can solve problems such as the inability to provide users with semiconductor memory
Inactive Publication Date: 2005-09-07
PS4 LUXCO SARL
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Problems solved by technology
As a result, when a large number of defective products occur, it happens that the semiconductor memory cannot be provided to the user
Method used
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[0079] The following is an outline description of embodiments of the present invention with reference to the accompanying drawings. 1 is a schematic diagram of a semiconductor memory production system according to a first embodiment of the present invention, and FIG. 2 is a flowchart of the semiconductor memory production system.
[0080] In FIG. 1 , a wafer production line 20 includes a plurality of production devices such as exposure equipment, film formation equipment, etching equipment, diffusion equipment, etc., which perform various processes on a semiconductor on a wafer 100 .
[0081] In processing step SA1 of FIG. 2, transistor elements and wirings are formed on the surface of the wafer 100, thereby producing a wafer on which semiconductor memories are arranged in a grid. Usually, 20 to 50 units of wafers 100 are contained in one carrier, which pass through the wafer production line 20 as one processing unit (hereinafter referred to as a lot), and predetermined proces...
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A semiconductor memory production system is provided, capable of holding the data necessary for process analysis for each lot in chronological order using a small amount of information, and which enables production management based on data that has been stored previously without performing new measurements. The semiconductor memory production system comprises: an LSI tester 1 that tests semiconductor memory and outputs the addresses of memory cells for each chip and a pass / fail bitmap corresponding to these addresses, and a process defect estimating device 34 that extracts the bit addresses of fail bits from the bitmap, and determines replacement addresses of word lines and bit lines to be replaced by redundant word lines and redundant bit lines in the redundant memory section, and estimates process defects from statistical analysis of the distribution condition of each chip on each wafer. Through this estimated result, feedback to the manufacturing line / process step prevents from producing defects frequently.
Description
technical field [0001] The present invention relates to a semiconductor memory production system and a semiconductor memory production method thereof, inferring a step that causes defects during wafer processing of semiconductor memory cells. Background technique [0002] In recent years, in order to improve the storage capacity of semiconductor memories, great efforts have been made to minimize the volume of memory cells formed on chips. [0003] If the multiple processing steps (wafer processing) required for manufacturing these miniaturized semiconductor memories cannot be quickly developed and stabilized, it is difficult to provide such semiconductor memories on demand. [0004] Therefore, for the development and stabilization of the processing steps required for the manufacture of these semiconductor memories, it is necessary to conduct failure analysis of the semiconductor memory and use the results obtained from this failure analysis to correct defects in the processi...
Claims
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IPC IPC(8): H01L21/00G05B19/418G06Q50/00G06Q50/04G11C29/44G11C29/56H01L21/02H01L21/66
CPCH01L22/20H01L22/22H01L2924/0002Y02P90/02H01L2924/00H01L21/00
Inventor 小川澄男原真一
Owner PS4 LUXCO SARL