Method for preparing n-type An1-XMgXO crystal film
A zn1-xmgxo, n-type technology is applied in the field of n-type doped Zn1-xMgxO crystal films and their preparation, which can solve the problems affecting the application of crystal films and achieve the effect of high doping concentration
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[0017] 1) Take ZnO, MgO and Al with a purity of 99.99% 2 o 3 powder, wherein the molar content of MgO is 20%, that is, the molar ratio of MgO:ZnO is 1:4, Al 2 o 3 The molar content is 0.1%. Then ZnO, MgO and Al 2 o 3 The powder is mixed and poured into an agate ball cup, and placed on a ball mill for ball milling. On the one hand, ZnO, MgO and Al can be 2 o 3 The powder is mixed evenly to ensure the uniformity of the prepared target. On the other hand, ZnO, MgO and Al 2 o 3 Powder refinement for subsequent ZnO, MgO and Al 2 o 3 Forming and sintering of mixed powders. After the ball milling, add the binder polyvinyl acetate, and press the powder into a disc with a thickness of 3mm and a diameter of 4cm; then sinter the pressed powder disc at 1000°C for 1 hour to form an organic bond. The agent is volatilized, and the Al-doped 2 o 3 Zn 0.8 Mg 0.2 O ceramic target.
[0018] 2) take the silicon chip as the substrate as an example, first clean the silicon chip wit...
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