The invention discloses a process for
doping growth P-type Zn1-xMgxO
crystal film into stibium, which uses a
pulsed laser deposition. A target material is
ceramic target which is mixed sintered by pure ZnO, MgO and Sb2O3 power, wherein
molar content x of Mg is less than 20 percent and more than 0, and the
molar content y of stibium is less than 5 percent and more than 0. After being cleaned, a substrate is put into a growth chamber of a
pulsed laser deposition device, the growth chamber is pumped to a vacuum, the substrate grows under
pure oxygen whose pressure is 0.1-1Pa, and the growth temperature is 300-500 DEG C. The invention is simple, P-type
doping concentration is capable of being controlled through adjusting the
molar content of the stibium in the target material, because
doping elements come from the target material, and high-concentration
dopant is capable of being achieved. The P-type Zn1-xMgxO
crystal film which is prepared by the process has excellent electrical properties, and the carrier concentration is 1015-1017 cm-3.