Method and system for avoiding anomaly stop of production device
A production device and abnormal technology, applied in the direction of charging system, idle speed device, general control system, etc., can solve the problems of pump failure, inability to perform life prediction, large parameter changes, etc., and achieve the effect of avoiding abnormal stop
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[0017] Abnormal stop avoidance system as an embodiment of the present invention, with figure 1 Examples of silicon nitride films (Si 3 N 4 film) composed of a reduced-pressure chemical vapor growth (LPCVD) device 5 and a CIM device 1 that controls and manages it. Such as figure 1 As shown, this LPCVD apparatus (production apparatus) 5 has a reaction chamber 521 having a closed structure capable of vacuum exhaust, and a vacuum pipe is connected to the exhaust side of the reaction chamber 521, and the exhaust side of the vacuum pipe is connected to a cooling system for cooling by water cooling. Water-cooled trap 17 of the cooling plate to trap solid reaction by-products. The exhaust side of the water-cooled trap 17 is connected to another vacuum pipe, and the pressure control valve 15 is connected to the exhaust side of the other vacuum pipe. In addition, another vacuum pipe is connected to the exhaust side of the pressure control valve 15, and the mechanical booster pump 18...
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