Light-receiving device and light-receiving module comprising said light-receiving device
A technology of light-receiving devices and light-receiving modules, which is applied to semiconductor devices, electrical components, circuits, etc., and can solve problems such as difficulty in achieving reliability, increasing parts and assembly processes for making light-receiving modules, and increasing costs
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[0020] Embodiments of the present invention will be described below with reference to the accompanying drawings. figure 1 A sectional view showing a light receiving device according to a first embodiment of the present invention, figure 2 for its floor plan. Light receiving device 1 has light receiving portion 3 formed on the upper surface of low impurity concentration substrate 2 , and short carrier lifetime layer 4 formed on the lower surface of substrate 2 .
[0021] Substrate 2 is, for example, a Si substrate of the first conductivity type (P type), with 4×10 13 cm -3 or lower device impurity concentration, thick 300μm. This substrate 2 is prepared to be highly resistive, for example, having a specific resistance of 500 Ωcm or higher, as a (P-) layer 2a. On the lower surface of the substrate 2, N-type impurities such as phosphorus (P) are diffused to form a second conductivity type (N-type) high impurity concentration layer 4 as a short carrier lifetime layer with a ...
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