Method for etching surface material with induced chemical reaction by focused electron beam on surface
A technology of focused electron beam and chemical reaction, applied in photosensitive material processing, originals for photomechanical processing, photoengraving process of pattern surface, etc., can solve problems such as transparency defects, lack of absorber materials, opacity, etc.
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[0045] figure 1 Shown is a schematic assembly diagram of a mask repair system 10 according to the method of the present invention, having a known molecular beam delivery system, hereinafter referred to as gas delivery system 12; a known electron beam system 14; a known photon beam system, hereinafter referred to as the laser beam system 16; and the computer control system 18 for triggering operations in due time and coordinating the beams - molecular beams, photon beams and electron beams.
[0046] The gas supply system 12 comprises a reservoir 20 for liquid or solid precursor - Peltier cooled -; a feed line 22 for a gaseous precursor; a feed line 24 for compressed air; a valve control 26, a pressure gauge 28 and a Temperature control 30 in reservoir 20 . Connection Valve control 26, pressure gauge 28 and temperature gauge are connected to computer control system 18 by means of a CAN open bus.
[0047] The reservoir 20 is connected to a nozzle header 38 by means of a feed pi...
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