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Adaptive microtype optical fibre connector

A fiber optic connector and self-adaptive technology, applied in the direction of optical waveguide light guide, optical waveguide coupling, etc., can solve the problems of damage, lack of space, and difficulty in grasping the scale of manual movement of micro-device structures, etc., and achieve the effect of small size

Inactive Publication Date: 2004-07-28
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

Even if the V-shaped groove is made by silicon etching technology and used in a micro-optical system, an additional cover plate must be added to fix the optical fiber in the V-shaped groove, which cannot take advantage of the high-density molding of the V-shaped groove. The goal of integrated manufacturing cannot be achieved
At the same time, the above-mentioned optical fiber connectors based on the V-groove alignment principle need to manually remove the cover plate to free a certain position during the optical fiber insertion process so that the optical fiber can enter the fixing groove, which is unacceptable for miniature optical fiber connectors. First of all, there is not enough space for operation, and secondly, it is difficult to grasp the scale of manual movement of the micro-device structure, which is easy to cause damage

Method used

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  • Adaptive microtype optical fibre connector
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Embodiment

[0024] Using single crystal silicon wafer as the substrate and electrodeposited nickel thin film as the cover material, a typical miniature optical fiber connector was prepared by multi-layer microstructure three-dimensional micromachining technology. The process is as follows:

[0025] Starting from thermally oxidized silicon wafers, first mask photolithography and then chemically etch with buffered hydrofluoric acid to open an etching window for the V-shaped groove 2, and then use 35% KOH to anisotropically etch at 70°C for about 3 hours to form V-groove 2. Fill the formed V-groove with photoresist (such as AZ4630, etc.), cure at low temperature, spin-cut and level off, spin-coat a 30-micron thick glue on the surface, go through photolithography, bake the glue at 90°C, and then spin-coat 5 microns The photoresist is then baked again at 95° C. for 100 minutes to form a semi-tapered photoresist structure that causes the two ends of the cover plate 3 to warp. Then photolithogra...

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Abstract

The present invention relates to an adaptive miniature optical fibre connector. It mainly includes silicon base body, V-type groove formed on the siliconb ase body, curved metal cover plate crossed over V-type groove and aerially-covering said V-type groove, two ends of the metal cover plate are warped and broadened to form bell mouth, its middle position is equipped with symmetrically-distributed slot openings, optical fibre fixing channel formed along the V-type groove between the metal cover plate and silicon base body, and two ends of said fixing channel respectively are semi-conical guide channels.

Description

technical field [0001] The invention relates to an adaptive miniature optical fiber connector, which is an optical fiber clamping and fixing mechanism capable of realizing reliable fixing and precise positioning of optical fibers and having a self-alignment function, and belongs to the technical field of optical fiber communication. Background technique [0002] Optical fiber communication is the mainstream direction of the development of modern communication technology. Its transmission medium is optical fiber. In this communication system, optical fiber connector is one of the most widely used passive devices. It connects optical fibers or optical cables to each other in a low-loss method. Get up to realize the continuation of the optical path. With the continuous development of optical communication technology and optical fiber optic instruments, the requirements for the fixed connection mechanism of optical fiber are getting higher and higher, especially the demand for r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/12G02B6/36
Inventor 蒋振新丁桂甫姚锦元
Owner SHANGHAI JIAO TONG UNIV
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