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UV waveband optic film plating method using baffle

An optical film and ultraviolet band technology, applied in optics, optical components, sputtering coating, etc., can solve the problem of inability to meet the needs of specific short-wavelength band film plating, improve utilization efficiency and performance, easy to install and disassemble, Good general effect

Inactive Publication Date: 2005-01-26
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] To sum up, the existing light control methods cannot meet the needs of coating thin films in specific short wavelength bands.

Method used

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  • UV waveband optic film plating method using baffle
  • UV waveband optic film plating method using baffle
  • UV waveband optic film plating method using baffle

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0040] Example 1: Using a baffle to realize the preparation of a 193nm thin film

[0041] 193nm optical thin films are widely used in microelectronics, medicine and other fields. Among them, microelectronics technology is the core technology of high-tech and information industry, and the core of microelectronics technology is micro-lithography technology. The 100nm step-and-scan lithography machine using 193nm wavelength has become the main development direction of the current lithography machine, and the 193nm ultraviolet film is a key component supporting its optical system. The 193nm optical film has a short wavelength and is in the vacuum ultraviolet (VUV) band, making it difficult to monitor. The coating machine (model: DMD-450) produced by Beiyi Factory is now used. This equipment has no ultraviolet light path, the control wavelength is visible light band, and the monitoring signal in the range of 500nm-700nm is ideal.

[0042] Step 1: According to the design wavelengt...

Embodiment 2

[0046] Example 2: Preparation of a 355nm thin film using a baffle

[0047] With the improvement of the light energy requirements of inertial confinement laser fusion and the rapid development of lasers, frequency-doubled lasers have very important application prospects, and frequency-doubled laser films have become the main technical bottleneck in the development of all-solid-state lasers. The coating machine (model: DMD-450) produced by Beiyi Factory is still used now, and a circular 2 / 3 baffle plate is used now (the area of ​​the baffled part is 1 / 3), and the installation method is the same as that of embodiment 1. When the control wavelength is adjusted to 550nm, the actual wavelength is between 355nm±2nm.

[0048] A 355nm optical film is plated on the device by using a baffle, which makes the device more versatile.

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Abstract

A method for plating UV wave band optical film by using the baffle in the vacuum chamber of the film plating machine is provided. The basic principle comprises: the geometric thickness of the film is proportional to the optical thickness of the film, the independent monitoring chip is employed for controlling the thickness of the film, some film materials of the substrate are screened and the film materials of the monitoring chip are not screened by using baffle in the process of plating film, which can make the film thickness of the monitoring chip be proportional to the film thickness of the substrate, the film thickness of the monitoring chip is coincident with the monitoring wavelength, the film thickness of the substrate is defined by the monitoring wavelength and the shape of the baffle and the monitoring chip is multiple times as thick as the substrate, so the long wave can be used as the monitoring wavelength for controlling the preparation of the short wavelength film. The invention employs the light control system of the available film plating machine for implementing the precise monitoring of UV film.

Description

Technical field: [0001] The invention relates to a coating machine, in particular to a method for coating an ultraviolet band optical film by using a baffle. Background technique: [0002] Due to the unique characteristics of short wavelength and low thermal effect of ultraviolet light, it is widely used in industry, medicine, astronomy, detection and other fields. The ultraviolet film is an important component to support the ultraviolet light path system, and their optical performance affects the efficiency of the entire system. In recent years, the demand for ultraviolet thin films has been increasing, which has brought new challenges to the development of ultraviolet films. The improvement of the optical properties of thin film components is one of the keys to improving the overall performance of ultraviolet light path systems. For the preparation of multilayer films, in addition to selecting appropriate film materials, evaporation processes and ensuring uniform film thi...

Claims

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Application Information

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IPC IPC(8): C23C14/56G02B1/10
Inventor 尚淑珍易葵张大伟占美琼廖春艳邵建达范正修
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI