Line scanning examination method for inclined transportation
An inspection method and line scanning technology, applied in the direction of material analysis, instruments, and measuring devices by optical means, can solve the problems of severe vibration, no development, and it is difficult to set the air volume of the blower on the glass substrate, so as to improve the ability, Increased throughput and reduced effectiveness of particle contamination inspection tasks
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[0024] Next, specific embodiments of the present invention will be described with reference to the drawings.
[0025] figure 1 It is a front view showing the basic structure of the system for implementing the scanning inspection method of the inclined conveying line of the present invention, figure 2 is a front view showing the tilting system. As shown in the figure, the line scanning inspection system in the inclined conveyance of a preferred embodiment of the present invention has a horizontal conveying device 20 installed on the conveyor main body 10 for supporting both sides of the glass substrate 1 for horizontal conveying, a spray nozzle The air floating device 40 ( figure 2 ), the tilting device 50 for tilting the glass substrate 1 placed on the horizontal transfer device 20 and for tilting the horizontal transfer device 20 and the air floating device 40 , and for tilting the glass substrate 1 together with the tilting device 50 The lower part of the glass substrat...
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