Line scanning examination method for inclined transportation

An inspection method and line scanning technology, applied in the direction of material analysis, instruments, and measuring devices by optical means, can solve the problems of severe vibration, no development, and it is difficult to set the air volume of the blower on the glass substrate, so as to improve the ability, Increased throughput and reduced effectiveness of particle contamination inspection tasks

Inactive Publication Date: 2005-02-02
SAMSUNG CORNING CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, this system is difficult to set the air volume of the blower due to the thickness, size and composition of the glass substrate, especially when the glass substrate is thin, large and light, and the vibration is severe
Therefore, it

Method used

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  • Line scanning examination method for inclined transportation
  • Line scanning examination method for inclined transportation
  • Line scanning examination method for inclined transportation

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Embodiment Construction

[0024] Next, specific embodiments of the present invention will be described with reference to the drawings.

[0025] figure 1 It is a front view showing the basic structure of the system for implementing the scanning inspection method of the inclined conveying line of the present invention, figure 2 is a front view showing the tilting system. As shown in the figure, the line scanning inspection system in the inclined conveyance of a preferred embodiment of the present invention has a horizontal conveying device 20 installed on the conveyor main body 10 for supporting both sides of the glass substrate 1 for horizontal conveying, a spray nozzle The air floating device 40 ( figure 2 ), the tilting device 50 for tilting the glass substrate 1 placed on the horizontal transfer device 20 and for tilting the horizontal transfer device 20 and the air floating device 40 , and for tilting the glass substrate 1 together with the tilting device 50 The lower part of the glass substrat...

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Abstract

The invention provides a line scanning test method in slant moving mode, which can simplify the test working procedure of the glass substrate for the two-dimensional display, and improve the test precision and speed. The invention is characterized in comprising the following steps: the line scanning of the glass substrate in slant moving mode is operated by the line scanning video camera and the gray value of each pixel is detected; the first difference value acquired by the detraction of the predetermined middle gray value from the detected gray value of the pixel is compared with the sensitivity threshold of the machine; the pixel gray value in the area around of the pixel with bigger first difference value than the machine sensitivity threshold is detected, and the second difference value acquired by the detraction of the average gray value of the glass substrate from the measured value is compared with the predetermined test sensitivity threshold; the area where the second difference value is bigger than the test sensitivity threshold is judged as a drawback, and the drawback is divided into special classes for distribution of big and small indexes; and the number of the drawbacks with big and small indexes is compared with the set threshold number to judge qualification.

Description

technical field [0001] The present invention relates to an inspection method of inclined line scanning (Line Scan). More specifically, the present invention relates to an inspection method of inclined line scanning. The glass substrate is inspected for defects while suppressing the vibration amplitude of the glass substrate within the depth of focus of the camera. Background technique [0002] As we all know, in the production of glass substrates used in the manufacturing fields of TFT-LCD (Thin film transistor-liquid crystal display), PDP (Plasma display panel), EL (Electro luminescence) and other flat display (Flat display), in the glass melting furnace (Glass The process of forming a flat surface from molten glass in the melting furnace and the cutting process of cutting according to a predetermined pattern. After manufacturing, the qualified and unqualified products are selected through the cleaning and inspection process. [0003] For example, in the technology describ...

Claims

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Application Information

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IPC IPC(8): G01B11/30G01N21/00G01N21/958G02B26/10G02F1/13
CPCG01N21/896G02F1/1309
Inventor 李昌夏金泽天金昔俊金奇南
Owner SAMSUNG CORNING CO LTD
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