Damage-free and non-contact analysis system

A non-contact analysis, a series of technologies, applied in the direction of non-contact circuit testing, material analysis, material analysis through electromagnetic means, etc., can solve problems such as difficult to distinguish

Inactive Publication Date: 2005-05-04
NEC ELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0018] However, in prior art non-destructive non-contact analysis systems, it is difficult to distinguish between defective and good magnetic field strength images, as will be stated in detail later

Method used

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  • Damage-free and non-contact analysis system
  • Damage-free and non-contact analysis system
  • Damage-free and non-contact analysis system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0067] refer to Figures 1 to 3 , an embodiment of the non-destructive non-contact analysis system according to the present invention will be described below.

[0068] The non-destructive non-contact analysis system is used to analyze and evaluate an object to be analyzed and evaluated, such as a silicon wafer, in which an electric current can be excited when irradiated with a laser beam. Note that this current is known in the art as OBIC (Beam Incentive Current), as already explained.

[0069] The non-destructive non-contact analysis system comprises a system control unit 10, which is structured as figure 2 microcomputer shown. That is, the system control unit 10 includes a central processing unit (CPU) 10A, a read only memory (ROM) 10B for storing various programs and constants, a random access memory (RAM) 10C for storing temporary data, input an output (I / O) interface circuit 10D, and two analog-to-digital (A / D) converters 10E and 10F.

[0070] Also, the non-destructi...

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Abstract

In a non-destructive non-contact analysis system for analyzing and evaluating a subject (SW), the beam generating / modulating device 12 emits a modulated focused beam (MLB) to thereby irradiate the subject (SW), and the modulation of the modulated focused beam is determined by a series of rules The modulated signal (MO-S) composed of pulses is realized. A magnetic detection device (22) detects a magnetic field (MF) generated by a current excited by irradiating an object with a modulated focused light beam, and thereby generates a magnetic field signal (MF-S). A signal extraction circuit (24) extracts a phase difference signal (PDF-S) between a reference signal (RE-S) and a magnetic field signal (MF-S). The image data generating system ( FIG. 14 ) generates phase difference image data (PDFij) based on the phase difference signal (PDF-S).

Description

technical field [0001] The present invention relates to a non-destructive non-contact analysis system for analyzing and evaluating an object, such as a semiconductor wafer, in which an electric current can be excited when it is irradiated with a light beam of a specific wavelength, and in particular to a method for analyzing an object including the use of a SQUID This non-destructive non-contact analysis system of the SQUID (Superconducting Quantum Interference Device) light scanning microscopy method of magnetic sensors. Background technique [0002] Currently, a non-destructive non-contact analysis system having a SQUID magnetic sensor has been researched and developed, which is used in practical applications for analyzing and evaluating semiconductor wafers. [0003] This prior art non-destructive non-contact analysis system includes a system control unit having a microcomputer, and a laser beam generating / modulating device operating under the control of the system contro...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/72G01R31/302G01R31/311
CPCG01R31/311G01N21/314G01R33/3621
Inventor 二川清
Owner NEC ELECTRONICS CORP
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