Matrix addressing vertical cavity surface emitting laser array device
A technology of vertical cavity surface emission and laser array, which is applied in the direction of laser components, lasers, semiconductor lasers, etc., can solve the problems of high process requirements, low reliability and repeatability, and difficult process, and achieve multi-addressing, Avoid the drift of the reflection peak wavelength and the effect of high reflectivity
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[0043] This embodiment includes a total of 8 rows and 8 columns, a total of 8 × 8 vertical cavity surface emitting laser units (see attached image 3 );
[0044] Combine below figure 1 with figure 2 , Describe the basic structure of the embodiment of the present invention.
[0045] Each vertical cavity surface emitting laser unit includes three stages with successively decreasing sizes: a bottom reflection mirror stage 10, an optical cavity stage 20, and a top reflection mirror stage 30, as well as a p-electrode 40 and an n-electrode 50;
[0046] The bottom reflector stage 10 includes:
[0047] Half of the insulating substrate 11;
[0048] -Gallium arsenide / alumina lower Bragg reflector 12;
[0049] An n-type heavily doped gallium arsenide conductive layer 13;
[0050] The optical cavity stage 20 includes:
[0051] An n-type doped aluminum gallium arsenide layer 21;
[0052] An undoped gallium arsenide lower confinement layer 22;
[0053] An undoped gallium arsenide / aluminum gall...
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