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Process of mfg. Mo alloyed targeting materials

A target material and raw material technology, which is applied in the field of preparing Mo alloy target materials, can solve problems such as unfavorable shape changes, and achieve the effects of reducing shape changes, increasing packing density, and reducing segregation

Active Publication Date: 2005-08-31
HITACHI METALS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, even with the method for preparing a target material made of Mo or Mo alloy disclosed in the above patent publication, when a target material made of Mo alloy containing one or more additive elements is prepared, there arises such a problem that it is easy to Segregation of one or more added elements occurs, which cannot be solved by the above method
In addition, there arises a problem of pressing and unfavorable shape change of the sintered body

Method used

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  • Process of mfg. Mo alloyed targeting materials
  • Process of mfg. Mo alloyed targeting materials
  • Process of mfg. Mo alloyed targeting materials

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] Mo powder with an average particle size of 12 μm, W (tungsten) powder with an average particle size of 12 μm, Nb powder with an average particle size of 100 μm, Ti powder with an average particle size of 100 μm, and Zr powder with an average particle size of 100 μm were prepared.

[0053] The target making materials of samples Nos. 1 to 6 shown in Table 1, which are the present invention, were prepared by the following method.

[0054] (1) To prepare each sample, Mo powder and any one of transition metal powders were weighed in given amounts in atomic %.

[0055] (2) The weighed powders were mixed for 10 minutes using a V-shape mixer to obtain raw material powders.

[0056] (3) Press the raw material powder under a pressure of 265 MPa by a CIP machine to form a green body.

[0057] (4) Grinding the green body with a jaw crusher and a disc mill to prepare secondary particles.

[0058] (5) Mix the secondary particles in a V-shaped mixer for 10 minutes, and then put them...

Embodiment 2

[0083] Sintered bodies having the same chemical composition and the same dimensions as those of inventive sample No. 2 shown in Example 1 were prepared in the same manner as in the case of inventive sample No. 2, after the HIP process, at a temperature of It was hot-rolled three times together with a container for pressurization under the conditions of 1150°C and a shrinkage ratio of not more than 50%. The ideal size of target material is: width is 1500mm and length is 1800mm. Table 2 shows the rolling results of the sintered body.

[0084]

sample number

chemical components

(atomic %)

Size of sintered body

(mm)

Target size in rolling

(mm)

heating temperature

(℃)

2-1

95.0Mo-5.0Nb

81×812×1053

25.7×1500×1800

1150

[0085] Total rolling reduction

(%)

First rolling reduction ratio

(%)

Second rolling reduction ratio

(%)

Third roll...

Embodiment 3

[0089] Recrystallization heat treatment was performed on the hot-rolled target materials in Example 2 at 900° C., 1150° C. and 1300° C. in vacuum, respectively. After heating the target material to the heat treatment temperature, the temperature is maintained for 1 hour, after which the workpiece is cooled. Sample Nos. 2-1-1, 2-1-2, and 2-1-3 were taken from the three types of workpieces, respectively. The microstructures of the samples were compared with each other using an optical microscope with a magnification of 100. The observed results are shown in Table 3. As for the samples subjected to recrystallization heat treatment at temperatures of 900 °C and 1300 °C, respectively, in Figure 4 and 5 Photographs of the microstructure of the samples shown by an optical microscope with a magnification of 100 are provided in , respectively.

[0090]

[0091] From Table 3, Figure 4 and 5 It can be seen that when the recrystallization heat treatment temperature is lo...

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Abstract

Disclosed is a method of producing a target material of a Mo alloy, which includes the steps of (a) preparing a green compact by compressing a raw material powder blend consisting of a Mo powder having an average particle size of not more than 20 mum and a transition metal powder having an average particle size of not more than 500 mum; (b) pulverizing the green compact to produce a secondary powder having an average particle size of from not less than an average particle size of the raw material powder blend to not more than 10 mm; (c) filling the secondary powder into a container for pressurizing; and (d) subjecting the secondary powder with the container for pressurizing to sintering under pressure thereby obtaining a sintered body of the target material.

Description

technical field [0001] The invention relates to a method for preparing a target material made of Mo alloy through a powder sintering method. Background technique [0002] Currently, thin films of refractory metals such as Mo having low resistance are used for thin-film electrodes, thin-film wiring, etc. in liquid crystal displays (hereinafter referred to as LCDs), and the metal thin films are generally formed of target materials for sputtering . In recent years, LCDs tend to be larger in size, and larger size target materials are required, especially, long objects with a length of not less than 1m, or sputtering areas larger than 1m 2 large size items. [0003] Conventionally, in response to the trend toward larger sized sputtering areas, several methods have been suggested, including a method of bonding a large number of original target material profiles to a backing plate. However, according to this method of making target material profiles using bonded large quantities...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B22F3/15B22F3/04B22F3/12B22F3/16B22F3/24C22C1/04C23C14/34
CPCB22F3/1208B22F2003/248B22F2998/10B22F2998/00C22C1/045C23C14/3414B22F3/162B22F5/003B22F1/09B22F1/148B22F3/15
Inventor 岩崎克典井上惠介植村典夫
Owner HITACHI METALS LTD
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