Magnetoresistance effect film and magnetoresistance effect head
A magnetoresistance effect, thin film technology, used in the manufacture of flux-sensitive magnetic heads, magnetic recording heads, magnetic field-controlled resistors, etc.
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[0023] Preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings.
[0024] figure 1 The basic structure of the magnetoresistance effect thin film according to the embodiment of the present invention is shown. An oxide layer 3 including cobalt-containing ferrite is formed on the magnesium oxide layer 2 serving as an orientation control layer, and a pinned magnetic layer 4, a nonmagnetic intermediate layer 5, a free magnetic layer 6, and a protective layer 7 are in this order stacked on the oxide layer 3.
[0025] The inventors conducted the following experiments.
[0026] Three magnetoresistance film samples were formed on silicon substrates by magnetron sputtering. The sample is as follows:
[0027] Sample "A": CoFe 2 o 4 10 / CoFe / Cu / Co / NiFe / Cu / Ta[nm]
[0028] Sample "B": (CoO_Co 3 o 4 )10 / CoFe 2 o 4 10 / CoFe / Cu / Co / NiFe / Cu / Ta[nm]
[0029] Sample "C": MgO 10 / CoFe 2 o 4 10 / CoFe / Cu / Co / NiFe / Cu / Ta[nm] ...
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Abstract
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