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Gallium oxide gas sensing film doped with metal oxide and preparation method thereof

A technology of sensing film and gallium oxide, which is applied to the field of gallium oxide gas sensing film doped with metal oxide and its preparation field, can solve the problems of poor gas sensing performance, reduced effective contact area, large particle size, etc. Induction performance, the effect of increasing the effective contact area

Inactive Publication Date: 2006-07-12
EAST CHINA UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The problem with the existing gallium oxide gas sensing film is that the particle size of gallium oxide in the film is relatively large (generally above 100nm), which leads to a decrease in the effective contact area between the film and the gas to be measured, and accordingly the gas sensing performance of the film is also poor.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0015] Under nitrogen protection, mix gallium acetylacetonate and tungsten ethoxide in a methanol solvent at a molar ratio of 1:0.05, add deionized water and hydrochloric acid, control the pH value to 2.0, stir for 4 hours, and obtain a coating sol after standing;

[0016] The above-mentioned coating sol was rotated in a homogenizer to coat the film. The speed of the homogenizer was 1600 rpm, the homogenization time was 30s, and the coating was repeated 20 times to obtain a gel film. The obtained gel film was first dried at 240°C for 1 hour, and then dried at 900°C for 1 hour to obtain the product. In the obtained film: the molar content of gallium oxide was 95%, and the average grain size of the film was 23 nm.

Embodiment 2

[0018] Under nitrogen protection, mix gallium acetylacetonate and tungsten ethoxide in a butanol solvent at a molar ratio of 1:0.25, add deionized water and nitric acid, control the pH value to 5.0, stir for 6 hours, and obtain a coating sol after standing still ;

[0019] The above coating sol was rotated in a homogenizer to coat the film. The speed of the homogenizer was 2000 rpm, the homogenization time was 45s, and the coating was repeated 20 times to obtain a gel film. The obtained gel film was first dried at 120°C for 2 hours, and then dried at 800°C for 1 hour to obtain the product. In the obtained film: the molar content of gallium oxide was 80%, and the average grain size of the film was 46 nm.

Embodiment 3

[0021] Under nitrogen protection, mix gallium acetylacetonate and tungsten ethoxide in ethylene glycol at a molar ratio of 1:0.11, add deionized water and sulfuric acid, control the pH value to 3.0, stir for 6 hours, and obtain a coating sol after standing still ;

[0022] The above-mentioned coating sol was rotated in a homogenizer to coat the film. The speed of the homogenizer was 4000 rpm, the homogenization time was 60s, and the coating was repeated 30 times to obtain a gel film. The obtained gel film was first dried at 240°C for 1 hour, and then dried at 800°C for 1 hour to obtain the product. In the obtained film: the molar content of gallium oxide was 90%, and the average grain size of the film was 32 nm.

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Abstract

The invention relates to a gas sensing gallium oxide film doped 5~20mol% tungsten oxide and prepared by sol-gel method. The AFM shows: the tungsten oxide generates obvious control action to gallium oxide size to reduce the size from about 100nm in pure gallium oxide to 30~40nm hear, enlarges the effective contact area of gas sensing film to tested gas, and improves gas sensing performance of the film.

Description

technical field [0001] The invention relates to a gas-sensitive material and a preparation method thereof, in particular to a gallium oxide gas-sensing film doped with metal oxide and a preparation method thereof. Background technique [0002] Gallium oxide gas-sensing film is a promising gas-sensing material. M.Fleischer et al. found that gallium oxide can treat NOx, CH 4 , O 3 Other gases are quite sensitive, and because they can be used at high temperatures (usually higher than 700 ° C), it can eliminate the interference of most interfering reducing gases and water vapor at medium and low temperatures. In addition, gallium oxide can also be used for the detection of carbon dioxide. [0003] The problem with the existing gallium oxide gas sensing membrane is that the gallium oxide particle size in the membrane is relatively large (generally above 100nm), which leads to a decrease in the effective contact area between the membrane and the gas to be measured, and accordin...

Claims

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Application Information

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IPC IPC(8): G01N27/12G01N27/04G01N27/26H01L49/00H10N99/00
Inventor 姜复松郑涛阮昊
Owner EAST CHINA UNIV OF SCI & TECH
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