Ionized gas sensor microarray structure based on micro-electronic fabrication technology
A technology of microarray structure and processing technology, applied in the field of devices in the field of microelectronics technology, can solve the problem of no device array structure, etc., and achieve the effects of enhancing signal strength, increasing detection precision and accuracy, and low work safety
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0012] Such as figure 1 As shown, the present invention includes a substrate 1, a microelectrode array 2, a microelectrode strip unit 3, and a sensor unit 4. The microelectrode array 2 is provided on the substrate 1, and the microelectrode array 2 includes multiple A microelectrode strip unit 3, each pair of adjacent anode and cathode electrode strips constitutes a sidewall electrode pair, as a structure for generating a controllable electric field, thus constituting a sensor unit 4, a plurality of sensor units constitute a microelectrode array, according to each sensor unit Whether the plane geometry and spacing of adjacent anode and cathode electrode strips are the same, the sensor unit is divided into equivalent cells and different cells. The equivalent cell means that the plane geometry and spacing of adjacent cathode and anode electrode strips in the two cells are completely the same and different. A cell means that the plane geometry or spacing of adjacent anode and cathode...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap