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Ionized gas sensor microarray structure based on micro-electronic fabrication technology

A technology of microarray structure and processing technology, applied in the field of devices in the field of microelectronics technology, can solve the problem of no device array structure, etc., and achieve the effects of enhancing signal strength, increasing detection precision and accuracy, and low work safety

Inactive Publication Date: 2006-07-26
SHANGHAI JIAO TONG UNIV
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Problems solved by technology

However, the article does not propose an array structure suitable for batch and high-precision processing.

Method used

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  • Ionized gas sensor microarray structure based on micro-electronic fabrication technology
  • Ionized gas sensor microarray structure based on micro-electronic fabrication technology

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Embodiment Construction

[0012] Such as figure 1 As shown, the present invention includes a substrate 1, a microelectrode array 2, a microelectrode bar unit 3, and a sensor unit 4. The microelectrode array 2 is arranged on the substrate 1, and the microelectrode array 2 includes multiple Each pair of adjacent negative and positive electrode strips constitutes a pair of sidewall electrodes, as a structure for generating a controllable electric field, thereby forming a sensor unit 4, and a plurality of sensor units form a microelectrode array, according to each sensor unit. Whether the plane geometric shape and spacing of adjacent negative and positive electrode strips are the same, the sensor unit is divided into equal units and different units. The same unit means that the plane geometry and spacing of adjacent negative and positive electrode strips in the two units are exactly the same, different A unit means that the planar geometry or spacing of adjacent cathode and anode strips in two units are di...

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Abstract

Disclosed is an ionizing gas sensor micro array which comprises: substrate, micro electrodes array, micro electrode bar units, sensor unit; the micro electrode array is placed on the substrate with plural micro electrode bar units, each adjacent positive and negative electrode bars form the side wall electrode pair for generating controllable electric field, therefore forms a sensor unit, a micro electrode array with plural sensors unit; the sensor unit is separated into equality unit and distinct unit, according to whether the plane geometry figure and distance of adjacent positive and negative electrode bar in each sensor unit.

Description

technical field [0001] The invention relates to a device in the technical field of microelectronics, in particular to an ionization gas sensor microarray structure based on microelectronic processing technology. technical background [0002] Sensors based on the mechanism of ionization of gas molecules in an electric field and the resulting transport of charged particles can be used to sense different gas components and content information. Compared with other types of sensors, the main advantage of this sensor is that it There is a high degree of selectivity. However, such sensors using traditional processing techniques and electrode materials and based on capacitive structures have a lot of defects, mainly because the working voltage is too high, usually reaching about kilovolts, resulting in low safety in use and requiring a relatively complex and expensive sensor. High-voltage circuits, cannot be processed to realize portable micro-devices, high cost, and difficult to r...

Claims

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Application Information

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IPC IPC(8): G01N27/62
Inventor 侯中宇蔡炳初张亚非徐东魏星
Owner SHANGHAI JIAO TONG UNIV
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