Laser feed-back displacement sensor based on frequency locked double-frequency laser

A dual-frequency laser and displacement sensor technology, which is applied in the direction of instruments, optical devices, and measuring devices, can solve problems such as small coherence length, limited distance, and poor coherence, and achieve strong anti-interference ability, large measurement range, and high cost performance Effect
CN1851392AInactive Publication Date: 2006-10-25TSINGHUA UNIV
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
TSINGHUA UNIV
Publication Date
2006-10-25
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a laser feedback location sensor based on frequency lock two-frequency laser. Putting the quartz crystal with 0-2.9 degree wedge angle is fixed in the cavity of laser to form frequency lock two-frequency laser. It uses the laser and the reflecting or dispersion object to form laser feedback system to measuring the displacement. The invention has simple and tight structure, high measuring accuracy, low cost and has large measuring range.
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Description

technical field

[0001] The invention belongs to the technical field of laser displacement measurement. Background technique

[0002] Laser displacement sensors are widely used in the field of industrial measurement and metrology. Among them, displacement sensors based on interference phenomena, such as interferometric optical fiber displacement sensors and laser interferometers, have the characteristics of large measurement range, high precision, and good linearity. They can be applied It is used in many occasions that require high measurement accuracy. However, this type of system has a very complex structure, large volume, is not easy to carry, has high requirements for collimation, high precision requirements for each component, is difficult to maintain, and the entire system is expensive. Compared with the traditional laser interferometer, the laser feedback interferometer that has emerged in recent years has the advantages of simple structure, compactness, easy alignme...

Claims

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