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Chemical and mechanical water-free polishing liquid for lithium-cessium borate crystal and leveling method

A chemical-mechanical and polishing liquid technology, used in polishing compositions containing abrasives, machine tools for surface polishing, and grinding/polishing equipment, etc. The problem of low finish is to improve the finish, reduce the surface unevenness, and improve the polishing efficiency.

Inactive Publication Date: 2006-11-08
HEBEI UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The present invention aims to solve the technical problems of difficult polishing caused by deliquescence and cracking of CLBO crystals, poor surface finish after polishing, and surface defects such as scratches, corrosion pits, polishing material pollutants, etc., which reduce the crystal laser damage threshold. And disclose a kind of effective anhydrous polishing liquid, polishing method to CLBO crystal

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Describe the preparation process of the present invention with embodiment 1:

[0026] First, the particle size of 100nm nano-SiO 2 Abrasive 4kg is dissolved in the organic solvent polyethylene glycol 93.9kg, then in the solution, add organic base triethanolamine 0.1kg to adjust the pH value of the solution to 8.5~9.5, add active agent Oπ-72kg, get the polishing solution of the present invention after stirring evenly .

[0027] The polishing liquid obtained in Example 1 was used for processing: when the polishing pressure was set to 0.05 MPa and the rotational speed was 50-60 r / min, the CLBO crystal was chemically mechanically polished for 5 minutes to obtain a globally flattened crystal surface.

[0028] The polishing liquid obtained in Example 2 was used for processing: when the polishing pressure was set to 0.08 MPa and the rotational speed was 30-40 r / min, the CLBO crystal was chemically mechanically polished for 10 minutes to obtain a globally flattened crystal sur...

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Abstract

The present invention discloses a kind of chemical and mechanical water-free polishing liquid for polishing lithium-cesium borate crystal and its polishing method. The polishing liquid of the present invention consists of nanometer silica abrasive 4-8 wt%, organic solvent 72-95 wt%, organic alkali 0.5-10 wt% and surfactant 0.5-10 wt%. It is used in polishing lithium-cesium borate crystal at polishing pressure of 0.05 MPa to 0.1 MPa, polishing disc speed of 30 rpm to 60 rpm, and polishing time of 5-10 min. The water-free polishing liquid of the present invention has high flowability, no toxicity, no pollutant, no corrosion, moderate concentration and good floatability, and can obtain polished lithium-cesium borate crystal surface with high smoothness and no crack.

Description

technical field [0001] The invention relates to the technical field of chemical mechanical polishing, and more specifically relates to a chemical mechanical polishing liquid for lithium cesium borate (CsLiB6O10, CLBO for short) crystal and a method for smoothing CLBO crystal. Background technique [0002] Lithium cesium borate (CsLiB6O10, CLBO for short) is a new type of nonlinear optical crystal material newly discovered in the 1990s. The advantages of growing large-size CLBO single crystals, etc. Its comprehensive performance is very good, especially the frequency doubling performance in the ultraviolet band, so that it has broad application prospects in broadband tunable lasers, all-solid-state short-wavelength lasers, especially deep-ultraviolet all-solid-state lasers. In addition, CLBO also has larger temperature bandwidth, angular bandwidth and spectral bandwidth, which make CLBO frequency doubling devices have higher stability in practical applications. With the dev...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C09G1/02B24B29/02C09G1/04
Inventor 刘玉岭王胜利
Owner HEBEI UNIV OF TECH
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