Manipulator of robot and workpiece conveying robot using said manipulator

A technology of robots and manipulators, applied in the field of manipulators, can solve the problems of excessive cooling, easy distortion of manipulators, and inability to cool manipulators, and achieve the effects of efficient cooling, uniform cooling, and efficient and uniform cooling
CN1939675BInactive Publication Date: 2010-05-12SANKYO SEIKI MFG CO LTD
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Patents(China)
Current Assignee / Owner
SANKYO SEIKI MFG CO LTD
Publication Date
2010-05-12
Estimated Expiration
Not applicable Β· inactive patent

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Abstract

The present invention provides a manipulator capable of efficiently and uniformly cooling the manipulator when a workpiece such as a glass substrate processed in hot environment is carried, and havinglightweight structure in comparison with a conventional one, and a workpiece carrying robot using the manipulator. The manipulator of a robot of the present invention comprises a loadbearing part 11which is formed in a shape having a hollow 11a insulated from the outside and for placing the workpiece thereon, medium introducing pipes 15 for introducing a cooling medium into the hollow 11a on oneend side of the loadbearing part 11, and a medium discharge opening 17 for discharging the cooling medium from the hollow 11a on the other end side of the loadbearing part 11.
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Description

technical field

[0001] The present invention relates to a manipulator of a robot for processing workpieces such as glass substrates and wafers in a high-temperature environment, and a workpiece transfer robot using the manipulator. Background technique

[0002] Conventionally, in the manufacturing process of flat panel displays (FPD) such as liquid crystal displays and plasma displays, and semiconductors, in order to transfer substrates such as flat glass and wafers as their base materials from a certain process to other processes as workpieces, many Sometimes use a substrate transfer robot. In addition, in this manufacturing process, the process of processing in a high-temperature heating furnace is included. For example, when manufacturing a glass substrate, the following steps are sometimes provided: taking out the glass substrate from the box for conveying between processes, coating the surface of the glass substrate with a chemical solution, and then carrying it into a...

Claims

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