Coating interfacial bond strength detecting method and apparatus based on XRD
A technology of interface binding strength and detection method, applied in the field of optical detection
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[0011] The details and working conditions of the specific device proposed by the present invention will be described in detail below in conjunction with the accompanying drawings.
[0012] Carry out XRD detection coating bonding interface intensity device with the present invention and comprise: (1) form incident optical path system by YAG laser, mainly by laser power supply 20, YAG laser 7, photodiode 8, power meter 9, laser beam connected successively through optical path 10. Circuit breaker 11, attenuator 12, lens 13, etc.; (2) worktable and sample fixture system, including numerical control workbench 15 and coating sample 14 placed on it, controller 19, and controller 19 respectively It is connected with the numerical control workbench 15 and the laser power supply 20; (3) the laser beam parameter detection signal detection and diagnosis system, which is mainly composed of the slit 2, the filter 3, the photodetector 4, the signal amplifier 6, and the He-Ne Laser 18 and the...
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