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Electron-emitting device manufacturing method, electron source manufacturing method, image-forming apparatus manufacturing method, and information displaying and playing apparatus manufacturing method

a manufacturing method and electron source technology, applied in the manufacture of electric discharge tubes/lamps, discharge tubes luminescnet screens, instruments, etc., can solve the problems of increasing cost, increasing cost, and difficult to uniformly control the length and shape of each carbon fiber located on the cathode electrode, so as to improve the electron emission characteristic, improve the stability and preferable electron emission characteristic, the effect of suppressing the effect of waste power consumption in driving

Inactive Publication Date: 2005-06-02
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

The present invention provides a method for manufacturing a field emission type electron-emitting device using carbon fibers that can improve the resolution of the display. The method includes preparing a first electrode with a plurality of carbon fibers and a second electrode located at a distance from the first electrode. In the second step, a potential higher than the potential of the second electrode is applied to the first electrode to remove short-circuited carbon fibers. This method can easily manufacture an electron-emitting device with superior electron emission characteristics and a stable and uniform display.

Problems solved by technology

Even when any method is used, it is hard to uniformly control the length and shape of each of the carbon fibers located on the cathode electrode.
However, the difference does not become essentially zero and a cost increases.
However, the difference does not become essentially zero and a cost also increases.

Method used

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  • Electron-emitting device manufacturing method, electron source manufacturing method, image-forming apparatus manufacturing method, and information displaying and playing apparatus manufacturing method
  • Electron-emitting device manufacturing method, electron source manufacturing method, image-forming apparatus manufacturing method, and information displaying and playing apparatus manufacturing method
  • Electron-emitting device manufacturing method, electron source manufacturing method, image-forming apparatus manufacturing method, and information displaying and playing apparatus manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

embodiment 1

[0152] An example in which a carbon fiber that causes short-circuit is removed by applying a voltage having polarity reverse to that in driving between the first electrode and second electrode of an electron-emitting device is described as Embodiment 1.

[0153]FIGS. 3A and 3B are the plan view and cross sectional view of an electron-emitting device manufactured in this embodiment. Hereinafter, steps of manufacturing the electron-emitting device according to this embodiment will be described in detail with reference to FIGS. 1A to 1D.

[0154] (First Step)

[0155] A quartz substrate was used as the substrate 1 and sufficiently washed. After that, a Ti layer having a thickness of 5 nm and a Pt layer having a thickness of 30 nm were successively formed as the first electrode 3 and the second electrode 2, respectively, by means of a sputtering method.

[0156] Next, a resist pattern was formed by means of a photo lithography process using a positive type photo resist. Then, the Pt layer and t...

embodiment 2

[0169] In Embodiment 2, an image display apparatus was manufactured using an matrix electron source produced by connecting a plurality of electron-emitting devices with a plurality of X-directional wirings and a plurality of Y-directional wirings. In this embodiment, an example in which the removal step was performed for each X-directional wiring will be described with reference to FIGS. 6 and 7.

[0170] In this embodiment, the X-directional wirings 62 were 400 wirings. Each of the wirings formed by means of an evaporation method had a thickness of about 1 μm and a width of 300 μm and contained Ag as a main component. The Y-directional wirings 63 were 600 wirings, each of which had a thickness of about 0.5 μm and a width of 100 μm and was formed by the same manner as that for the X-directional wirings 62. The interlayer insulating film which was not shown was provided at the intersections between the X-directional wirings 62 and the Y-directional wirings 63 and electrically insulated...

embodiment 3

[0180] An example in which the removal step was performed on only an electron-emitting device in which short-circuit occurs in a display apparatus serving as an image-forming apparatus including the matrix electron source on which the plurality of electron-emitting devices in Embodiment 2 were arranged will be described in this embodiment.

[0181] The electron source shown in FIG. 6 was manufactured as in Embodiment 2. Even in this embodiment, the Y-directional wiring 63 was connected with the cathode electrode and the X-directional wiring 62 was connected with the control electrode.

[0182] The electron source was manufactured by the same manufacturing method as that in Embodiment 1 and had the same structure as that in Embodiment 1. Note that the step of removing the carbon fiber that caused short-circuit was not performed. A current-voltage characteristic of each of the electron-emitting devices in such an electron source was measured. As a result, a leak current which might be cau...

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Abstract

Provided is an electron-emitting device using a carbon fiber as an electronic member. A carbon fiber through which a cathode electrode and a control electrode are short-circuited is removed to obtain an electron-emitting device having a uniform electron emission characteristic. A first electrode including a plurality of fibers each containing carbon and a second electrode are prepared. Then, a voltage is applied between the first electrode and the second electrode with a state where a potential of the first electrode becomes higher than a potential of the second electrode to remove a carbon fiber through which the first electrode and the second electrode are short-circuited.

Description

BACKGROUND OF THE INVENTION [0001] 1. Field of the Invention [0002] The present invention relates to a method of manufacturing an electron-emitting device, a method of manufacturing an electron source using the electron-emitting device, and a method of manufacturing an image-forming apparatus using the electron source. The present invention further relates to a method of manufacturing an information displaying and playing apparatus such as a flat television capable of displaying and playing various signals for television broadcasting, teletext, satellite broadcasting, cable television broadcasting, and the like. [0003] 2. Related Background Art [0004] In recent years, as disclosed in Japanese Patent Application Laid-Open No. 2002-150929 (corresponding to US 2002031972 A), Japanese Patent Application Laid-Open No. 2001-180920 (corresponding to US 2001006869 A), and U.S. Pat. No. 6,423,583 B, electronic devices using a fiber containing carbon (carbon fiber), such as a carbon nanotube ...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01J1/30H01J1/304H01J9/02
CPCB82Y10/00H01J1/3048H01J9/025H01J2201/30469Y10T29/49169Y10T29/49002Y10T29/49147Y10T29/49128Y10T29/49155Y10T29/49156B82Y40/00
Inventor SHIMAZU, AKIRATAKEGAMI, TSUYOSHI
Owner CANON KK
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