Ion gun deposition and alignment for liquid-crystal applications

Abstract

An apparatus for depositing and aligning an amorphous film in a single step, a method of forming an aligned film on a substrate in a single step by combining the deposition and alignment of an alignment layer into a single-step using ion beam processing and an amorphous film having an aligned atomic structure prepared by a method in which an aligned film is deposited and aligned in a single step are provided. The film is deposited and aligned in a single step by bombarding a substrate with an ion beam at a designated incident angle to simultaneously (a) deposit the film onto the substrate and (b) arrange an atomic structure of the film in at least one predetermined aligned direction.

Description

APPLICATIONS [0001] This application is a Continuation-In-Part of and claims priority from U.S. application Ser. No. 09 / 608,798, filed on Jun. 30, 2000.BACKGROUND OF THE INVENTION [0002] 1. FIELD OF THE INVENTION [0003] The present invention relates to an amorphous film having an aligned atomic structure and an apparatus for making such an amorphous aligned film. More particularly, the present invention relates to an amorphous film having an aligned atomic structure prepared by a method in which an aligned film is deposited and aligned in a single step and to an apparatus for depositing and aligning such as an amorphous film in a single step. [0004] 2. DESCRIPTION OF THE PRIOR ART [0005] The alignment of liquid crystal molecules on a surface is one of the critical steps in the manufacturing of a liquid crystal display. The industry-wide method for producing such alignment is through the mechanical rubbing of a polyimide surface. This method requires a physical contact between a roll...

AI Technical Summary

Benefits of technology

[0020] The method by which these films are prepared is a dry deposition and alignment technique, which reduces the need for pre- and post-wet processing. The present method is also a non-contact deposition and alignment technique, which reduces any potential contamination of the surface by extraneous debris, such as those commonly encountered in the contact rubbing techniques of the prior art.

[0021] Accordingly, the present invention provides a simple and cost effective

Problems solved by technology

For example, because the rubbing method is a contact technique, debris can be generated during the rubbing process resulting in a low process yield.

Also, as the roller or brush rubs the surface of the display, electrostatic charges can build up which may discharge through the thin film transistors (TFT) resulting in a lowering of the process yield.

Thus, choice of materials that are suitable for use in the rubbing

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