Pad Conditioner and Method for Making the Same
a technology of conditioner and pad, which is applied in the field of making a pad conditioner, can solve the problems of high defectivity, large height variation of the top end and large deviation of the height of the diamond abrasive grain relative to the substrate surfa
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Example 1
[0045]A die 2 made by wire cutting techniques was provided to imprint a plastic substrate 11 so as to form a plurality of pyramidal recesses 12 therein (FIGS. 3-5). The die 2 was made from a stainless steel plate 21 that was formed with a plurality of right pyramids 22 protruding from a die surface 211 of the stainless steel plate 21 having a diameter of 110 mm and a thickness of 30 mm. The right pyramids 22 were distributed over a region with a diameter of 100 mm on the die surface 211. The distance between tip ends 221 of each two adjacent ones of the right pyramids 22 was 700 μm. The tip end 221 of each of the right pyramids 22 defined an angle of about 90° and a height of 350 μm relative to the die surface 211. The plastic substrate 11 was made from polypropylene, and had a diameter of 110 mm and a thickness of 0.4 mm. A pressure of 10 MPa was applied on the die 2 to imprint the plastic substrate 11 so as to form about 15785 pyramidal recesses 12, each of which defined ...
example 2
[0062]The pad conditioner 100 of Example 2 was prepared by steps similar to those of Example 1, except that the height 311 of the adhesive 31 relative to the sharp closed end 121 of the recess 12 was about 150 μm (see FIG. 8).
[0063]FIG. 16 is a microscope image showing a configuration of the pad conditioner 100 of Example 2 at 60× magnification. Since the height 311 of the adhesive 31 in the recess 12 of Example 2 was higher than that of Example 1, the height of the protrusions 61 of Example 2 was smaller than that of Example 1. By examining about 1000 diamond abrasive grains 4 of the pad conditioner 100 via observing the microscope image, the number of the diamond abrasive grains 4 with the sharp corners 913, 914 as the top ends was 810, i.e., the percentage of the number of the diamond abrasive grains 4 with the sharp corners 913, 914 as the top ends was 81%.
[0064]FIG. 17 is a surface profile measuring graph showing the heights 44 of a portion of the diamond abrasive grains 4 of E...
example 3
[0065]The pad conditioner 100 of Example 3 was prepared by steps similar to those of Example 1, except for the manners of making the plastic substrate 11 and filling the adhesive 31.
[0066]The die 2 was formed by V-shaped groove grinding machining techniques, in which an annular region (which has an inner radius of 23.6 mm and an outer radius of 51.3 mm) of a stainless steel (SUS420) body was cut and ground from three directions (each direction pair forming an angle of 120 degrees) so as to form a plurality of V-shaped grooves in each direction. The distance between each two adjacent ones of the V-shaped grooves was 1.23 mm. The grinding angle was 70.52°. The depth 122 of the V-shaped grooves was about 0.577 mm.
[0067]A pressure of 10 MPa was then applied on the die 2 thus formed to imprint the plastic substrate 11 (polypropylene), which had a diameter of 110 mm and a thickness of 1.0 mm, so as to form 7192 right-cone recesses 12 therein, each of which defined an angle of 90°, and a d...
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