Protective film mainly composed of a tetrahedral amorphous carbon film and a magnetic recording medium having the protective film

a technology of tetrahedral amorphous carbon film and protective film, which is applied in the field of protective film of magnetic recording medium, can solve the problems of large amount of aggregate particles and the inability of conventional technologies to fully meet the rigorous requirement for reducing aggregate particles, and achieves low flying height of magnetic head, high density recording, and reduced magnetic spacing

Inactive Publication Date: 2009-11-26
FUJI ELECTRIC CO LTD
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  • Abstract
  • Description
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  • Application Information

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Benefits of technology

[0018]Taking the above described construction and using a cathode target of glass state carbon in an FCA method, a ta-C film has been obtained that is denser than a DLC film formed by a plasma CVD method and that contains aggregate particles so reduced as to be at a necessary and sufficient level. The resulting ta-C film is usef

Problems solved by technology

The ta-C film formed by the FCA method, however, has a problem in that it contains a large amount of aggregate parti

Method used

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  • Protective film mainly composed of a tetrahedral amorphous carbon film and a magnetic recording medium having the protective film
  • Protective film mainly composed of a tetrahedral amorphous carbon film and a magnetic recording medium having the protective film
  • Protective film mainly composed of a tetrahedral amorphous carbon film and a magnetic recording medium having the protective film

Examples

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example 1

[0042]First, on an aluminum substrate with a diameter of 95 mm and a thickness of 1.75 mm sequentially deposited were: an underlayer 20 nm thick of CoZrNb, an intermediate layer 15 nm thick of ruthenium, and a magnetic recording layer 15 nm thick of CoCrPt—SiO2, to fabricate a semi manufactured magnetic recording medium. The resulting semi-manufactured magnetic recording medium was installed as a target substrate for film deposition in a film deposition chamber of an FCA device.

[0043]A voltage of 30 V was applied between an anode and a cathode target composed of glass state carbon (Glassy Carbon, a product of Tokai Carbon Co, Ltd.) and a striker electrode contacted the cathode target to run an electric current of 120 A and to initiate an arc discharge. Adjusting the deposition time, a protective film was formed depositing a ta-C film 3.0 nm thick on the magnetic recording layer. Thus, a magnetic recording medium was obtained.

examples 2 and 3

[0044]Magnetic recording media of Examples 2 and 3 were obtained repeating the same procedure as in Example 1 except that the ta-C films deposited had thicknesses of 2.5 nm in Example 2 and 2.0 nm in Example 3, by correspondingly varying the deposition time.

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Abstract

A protective film is disclosed that is mainly composed of a tetrahedral amorphous carbon (ta-C film) that is denser than a DLC film formed by a plasma CVD method and containing aggregate particles so reduced as to a necessary and sufficient level, to provide a method of manufacturing such a protective film, and to provide a magnetic recording medium comprising such a protective film. The film is mainly composed of a ta-C film formed by a filtered cathodic arc method using a cathode target of glass state carbon. A magnetic recording medium is disclosed which includes a substrate, a magnetic recording layer, and the protective film mainly composed of a ta-C film.

Description

BACKGROUND OF THE INVENTION[0001]A. Field of the Invention[0002]The present invention relates to a protective film of a magnetic recording medium.[0003]B. Description of the Related Art[0004]Existing magnetic recording media have a protective film composed of a diamond-like carbon (DLC) film deposited on a magnetic recording layer by means of a plasma CVD method in order to protect the magnetic recording layer against damage resulting from contact with and sliding of a magnetic head and corrosion of the magnetic recording layer. The DLC film exhibits such a good surface smoothness and large hardness as to be suited for a coating film. The DLC films are formed by means of a sputtering method and a plasma CVD method.[0005]Magnetic recording media are now changing from the longitudinal recording system to the perpendicular recording system, the latter being capable of higher recording density than the former. For enhanced recording density of a magnetic recording medium, the perpendicu...

Claims

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Application Information

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IPC IPC(8): G11B5/72H05H1/24
CPCG11B5/72G11B5/8408Y10T428/265Y10T428/27Y10T428/30G11B5/727
Inventor NAGATA, NARUHISA
Owner FUJI ELECTRIC CO LTD
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