Cleaning liquid for lithography and method for forming wiring
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[0110]The present invention will be described in more detail by the following Examples, but is not limited to the Examples.
(Preparation of Cleaning Liquid for Lithography)
[0111]Cleaning liquids for lithography were prepared with the compositions and blending quantities shown in Table 1. Each reagent used was commercially available common reagent unless otherwise mentioned. The unit of the numbers shown in the table is % by mass unless otherwise mentioned.
(Evaluation of Etching Rate for Low Dielectric Constant Layer)
[0112]A film of a low dielectric constant material Aurora ULK (manufactured by ASM Japan K.K.) was formed on a silicon substrate to give a silicon substrate provided with a low dielectric constant layer with a thickness of 1500 Å. This silicon substrate was immersed in the cleaning liquid for lithography heated to 60° C. for 30 minutes. After completion of the immersion, the silicon substrate was rinsed with pure water, followed by measurement of the thickness of the low ...
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