Instrument for moving and positioning of optical elements with nanometric mechanical stability and resolution in synchroton light source beamlines
a technology of mechanical stability and optical elements, applied in instruments, optical elements, nuclear engineering, etc., can solve the problems of limited form, limited stability of existing construction technologies of dcms, and limited stability of existing construction technologies
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[0022]The disclosure provides a synchrotron light source beamline instrument that meets the high demands of the new generation of synchrotron light sources. To this end, the instrument proposed in this disclosure is characterized for:
[0023]at least one balance movable mass attached to the reference structure in one or more directions, in the same manner as the mounting structure, wherein the moving means of the mounting structure acts in relation to the balance mass, instead of in relation to the reference structure;
[0024]a positioning means which measures the position of the mounting structure directly relative to the reference structure for greater accuracy,
[0025]a main loop feedback control including the positioning means and the moving means, wherein the interferometer information is used to control the position of the mounting structure relative to the base by means of the moving means.
[0026]The active feedback can be improved (broader control band, typically above 100 Hz) with...
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