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Process for decomposing fluorine compounds

A technology of fluorine compounds and compounds, applied in separation methods, chemical instruments and methods, perfluorocarbon/hydrofluorocarbon capture, etc., can solve problems such as low acceptable concentration and danger

Inactive Publication Date: 2007-10-17
RESONAC HOLDINGS CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Acceptable concentrations of gaseous iodine are as low as 0.1ppm, and the gas is hazardous in contact with human skin

Method used

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  • Process for decomposing fluorine compounds

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0033] Examples of fluorine compounds containing iodine in the molecule that can be decomposed and rendered harmless by the method of the present invention include compounds such as CF 3 I. CF 2 I 2 、CFI 3 、CHF 2 I. CH 2 FI, CCIF 2 I. CClFI 2 、CHFI 2 、C 2 f 5 I.C 2 f 4 I 2 、C 2 CIF 4 I.C 2 CIF 3 I 2 、C 2 Cl 2 f 2 I 2 、C 2 HF 4 I.C 2 HF 3 I 2 、C 2 h 2 f 3 I.C 2 HClF 3 I.C 2 f 3 I.C 2 f 2 I 2 、C 2 HF 2 I.C 2 f 5 IO and C 2 f 4 I 2 O.

[0034] According to the method of the present invention, in the process of decomposing the fluorine compound containing iodine in the molecule, the gas of the above-mentioned compound can be diluted with inert gas such as helium, argon and nitrogen or air, or the gas can be a mixed gas, It is liquid at normal temperature, but contains its vapor in an amount of 0.01% by volume or more when combined with other inert gas or air. The gas may be a single gas or may be a mixture of two or more gases.

[0035]...

Embodiment 1

[0080] The decomposition reaction and removal by adsorption were performed under the conditions shown in Table 2.

[0081] In the reactor outlet gas, the concentration of the processed target gas is less than the detection limit. And, in the gas at the outlet of the adsorption tower, iodine can be removed below the allowable concentration.

Embodiment 2

[0083] The operation of Example 1 was repeated except that the decomposition reaction temperature was changed to 300°C. In the reactor outlet gas, the concentration of the processed target gas is less than the detection limit. And, in the gas at the outlet of the adsorption tower, iodine can be removed below the allowable concentration.

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Abstract

A fluorine compound having iodine within the molecule is decomposed by a decomposition reactive agent comprising alumina and an alkaline earth metal compound, the produced chlorine, fluorine and / or sulfur are fixed as a chloride, a fluoride and / or a sulfate of alkaline earth metal in the reactive agent, and iodine, which cannot be fixed as a salt of alkaline earth metal, is removed by an adsorbent.

Description

[0001] Cross References to Related Applications [0002] This application is an application filed under 35 U.S.C. § 111(a) claiming the filing date of provisional application 60 / 447,004 under 35 U.S.C. § 119(e)(1) pursuant to 35 U.S.C. §111(b) filed February 13, 2003. technical field [0003] The present invention relates to a method for decomposing fluorine compounds. More specifically, the present invention relates to a method for decomposing fluorine compounds containing iodine in their molecules to make them harmless. Background technique [0004] Hitherto, so-called PFC (perfluorocarbon) gases such as CF 4 、C 2 f 6 and C 4 f 8 Mainly used in etching or cleaning processes using silicon-based compounds. However, these gases have problems in that they have a long lifetime in the air and their global warming coefficient is high. In view of curbing global warming, the Kyoto Protocol (COP3) has called for their use to be greatly reduced. In order to meet the above-me...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B01D53/68B01D53/70A62D3/00H01L21/3065
CPCB01D2253/104B01D53/685B01D2257/2027Y02C20/30B01D53/70B01D53/8662B01D2257/2066B01D2257/2068B01D53/68H01L21/3065
Inventor 冈正和
Owner RESONAC HOLDINGS CORPORATION
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