Thin-film transistor array substrate structure
A technology of array substrate structure and thin film transistor, which is applied to transistors, electric solid state devices, semiconductor devices, etc., can solve the problems of general products without structure, and achieve the effect of improving performance
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[0047] The specific implementation, structure, features and functions of the thin film transistor array substrate structure according to the present invention will be described in detail below with reference to the accompanying drawings and preferred embodiments.
[0048] It is generally known that a dielectric layer of inorganic material, such as SiOx, SiNx, etc., is covered on the thin film transistor. Although the above-mentioned inorganic materials have a protective effect on the thin film transistor itself, they are not helpful to the film quality of the gate insulating layer in the thin film transistor. Therefore, in this embodiment, the hydrogen-containing dielectric layer is used as the inner dielectric layer, planar layer, reflective bump layer, or wide viewing angle bump layer on the thin film transistor, and the hydrogen-containing dielectric layer is used to repair the gate insulation. layer purpose.
[0049] In this embodiment, only the top electrode type polysil...
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