Silicon gate etching method
A technology of over-cutting and silicon wafers, which is applied in the manufacture of electrical components, semiconductor/solid-state devices, circuits, etc., can solve the problems of forming a uniform airflow distribution, causing micro-channel effects, charge accumulation effects, etc., and the method is simple Ease of operation, eliminate micro-channel effects, and avoid variable effects
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Embodiment 1
[0017] In the 200mm etch chamber, 200sccm He was injected after the main etching step was completed.
[0018] On the Nmc plasma etching machine, the specific process is as follows:
[0019] Initial etching: 350W / BP40W / 10mT / 100sccm CF4 / 5Sec.
[0020] Main etch: 350W / BP40W / 7mT / 30sccm C12 / 160sccm HBr / 10sccm HeO2 / OES.
[0021] New: 350W / BP0W / 80mT / 200sccm He / 5Sec.
[0022] Overetch: 250W / BP80W / 80mT / 160sccm HBr / 10sccm He / 10sccm HeO2 / 40Sec.
[0023] We sectioned the etched silicon wafer, and it can be seen through a scanning electron microscope that under the new process conditions, there is no micro-channel phenomenon in the line section.
Embodiment 2
[0025] According to the method described in Example 1, the difference is that 150 sccm He and 20 sccm Ne are fed after the main step is completed.
[0026] We sectioned the etched silicon wafer, and it can be seen through a scanning electron microscope that under the new process conditions, there is no micro-channel phenomenon in the line section.
Embodiment 3
[0028] According to the method described in Example 1, the difference is that 300 sccm Ar is introduced after the main step is completed.
[0029] We sectioned the etched silicon wafer, and it can be seen through a scanning electron microscope that under the new process conditions, there is no micro-channel phenomenon in the line section.
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