Method for preparing glass waveguide by single-side molten salt electric field assistant ion exchange

Abstract

The invention discloses a method for producing buried glass optical waveguide by single-side fused salt electric field auxiliary ion exchange technique. Wherein, first processing the ion exchange on the glass basic plate with mask in the fused salt with high polarized ion, to attain the ion exchange area on the glass surface; preparing a baffle layer on the surface of glass basic plate and far away from the core of optical waveguide, to stop ion passing said glass basic plate in the following ion exchange process, while the passed ion will reduce the cathode and destroy the metallic film electrode; at last, the anode uses the fused salt without high polarized ion, and the cathode uses metallic film, and using single-side fused salt electric field auxiliary ion exchange technique to prepare optical waveguide. The invention can effectively restrain the hurt of cathode metallic film in the process of electric field auxiliary ion exchange, to improve the property of glass optical waveguide.

Description

technical field [0001] The invention relates to the fields of optical devices and integrated optics, in particular to a method for preparing buried glass optical waveguides by unilateral molten salt electric field assisted ion exchange. Background technique [0002] In 1969, S.E.Miller proposed the concept of integrated optics. The basic idea is to use a material with a slightly higher refractive index to make an optical waveguide on the surface of the same substrate, and then make various devices such as light sources and gratings on this basis. . Through this integration, the miniaturization, weight reduction, stabilization and high performance of the optical system can be realized. [0003] As an important class of integrated optical devices, the optical devices fabricated on glass substrates by ion exchange method have always been valued by business circles and researchers. Since the 1970s, research institutions in various countries have invested a lot of manpower and ...

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Problems solved by technology

However, in the actual operation process, there are certain problems in this process. As the ion exchange process proceeds, a large amount of monovalent alkali metal (Na + etc.) on the negative electrode metal film 8 is reduced to an alkali metal with extremely active chemical properties, and then reacts with oxygen in the air to form an alkaline oxide, which causes corrosion to the metal film 8 and makes the metal film 8 dissipate from the glass substrate 1 The surface falls off, so that the ion exchange cannot be carried out normally

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