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Method for on-line manufacturing micro-electrode based on micro-electrolyze grinding of cutting-edge electrode

A micro-electrode and micro-electrolysis technology, which is applied in the field of special processing, can solve the problems that the forming electrode cannot be processed with high precision, it is difficult to ensure the coaxiality of the electrode and the table surface electrode and the rotating spindle, and it is difficult to meet the micro-EDM machining. Achieve the effect of improving the stability of the processing process, improving the ability, and high real-time performance

Active Publication Date: 2008-10-08
SHANGHAI JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above-mentioned patents all use photolithography to manufacture micro-shaped electrodes off-line, so there are inevitably two shortcomings: First, the serious electrode loss phenomenon in EDM makes the shape of the shaped electrodes change quickly and cannot be processed with high precision. processing; secondly, due to the inevitable installation error and deformation error in the secondary installation of the electrode, it is difficult to ensure the perpendicularity of the electrode and the worktable and the coaxiality of the electrode and the rotating spindle. The method of secondary installation on the spindle head is difficult to meet the requirements of micro-EDM

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0013] The electrode material to be processed is silver-tungsten alloy, the edge electrode is made of stainless steel blade, the electrolyte is sodium nitrate solution with a concentration of 1-2%, the processing voltage is 6V, the pulse width and pulse interval are 30μs, and the feed rate is 1μm / s.

[0014] Implementation effect: the current waveform is stable, short circuit and spark power generation rarely occur, the cutting edge electrode has no loss, and the fine columnar electrode can be stably processed, and the processing efficiency is high.

Embodiment 2

[0016] The electrode material to be processed is silver-tungsten alloy, the cutting edge electrode is made of stainless steel blade, the electrolyte is sodium nitrate solution with a concentration of 1-2%, the processing voltage is 10V, the pulse width and pulse interval are 50μs, and the feed rate is 0.5μm / s.

[0017] Implementation effect: the current waveform is relatively stable, spark generation occurs occasionally, and the cutting edge electrode has a little loss, and the fine columnar electrode can be processed, and the processing efficiency is high.

Embodiment 3

[0019] The electrode material to be processed is silver-tungsten alloy, the cutting edge electrode is made of stainless steel blade, the electrolyte is sodium chlorate solution with a concentration of 3-4%, the processing voltage is 6V, the pulse width and pulse interval are 30μs, and the feed rate is 1μm / s.

[0020] Implementation effect: the current waveform is stable, short circuit and spark power generation rarely occur, the cutting edge electrode has no loss, and the fine columnar electrode can be stably processed, and the processing efficiency is high.

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PUM

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Abstract

The invention relates to an online production of ultra-fine electrode, based on blade electrode ultra-fine electrolyte grinding, belonging to the specific machining technique. Wherein, the feeding resolution of ultra-fine electric machining platform is 0.1 mum, the repeated positioning error is lower than 2 mum; the ultra-fine electrode online detector has 1.61 mum resolution and the magnifying power at 113-729; the impulse power source integrates the detections of signal generation, power magnification, machining current and machining voltage, to stabilize the output minimum impulse width as 300ns, the voltage as 0-10V, and the current as 0-2A; it selects the electrolyte at low density; the blade electrode is controlled by the digit system of machine tool, to be driven by the executor to grind and remove the pole ultra-fine electrode material layer to layer, to obtain the final size; while it has grinded one layer, it uses the ultra-fine electrode online detector to detect and measure the ultra-fine electrode, to find the electric parameter and feeding amount in next grinding step. The invention can effectively overcome the defects of traditional electrolysis machining method.

Description

technical field [0001] The invention relates to a method in the technical field of special processing, in particular to an on-line manufacturing method of a micro electrode based on micro electrolytic grinding of an edge electrode. Background technique [0002] Compared with the silicon microfabrication technology based on planar pattern transfer printing technology, microelectromachining technology can adapt to a wider range of processing materials, and its inherent three-dimensional processing ability highlights the unique advantages and strong vitality of this processing technology , can meet the growing needs of micro-manufacturing in aerospace, microelectronics, optoelectronics, biomedicine, medical treatment, automobiles, chemical fibers, molds, micro fuel cells, micro internal combustion engines, etc. In recent years, micro-electromachining has made many breakthroughs in industrial application research. Because of this, micro-electromachining technology has regained t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B1/00
Inventor 赵万生
Owner SHANGHAI JIAOTONG UNIV