Column-hole type rectification tower

Abstract

The present invention relates to a perforated column type fractionating tower. It is an equipment for purifying arsenic trichloride. Said fractionating tower still, tower column and condenser, the top portion of said tower column is connected with said condenser, and its bottom portion is connected with the tower still. It is characterized by that the vertical tower column is formed from several sectional tower shell which are connected together, in the interior every sectional tower shell several horizontal trays are set, and connected with sectional tower shell wall, on every tray several perforated columns and one overflow tube are set, the top end of said perforated column is closed, and on the column wall at least one layer of air holes is set, the vertical overflow tubes of adjacent trays are alternatively arranged, and the lower portion of overflow tube of lowest one tray of tower column is equipped with a liquid seal ring.

Description

Technical field: [0001] The present invention relates to a device for purifying arsenic trichloride. Background technique: [0002] With the rapid development of world information technology, aviation, aerospace, optoelectronic products and other technologies, higher requirements are put forward for the quality of semiconductor basic materials. High-purity arsenic is one of the basic materials for the development of semiconductor devices, and the performance of the device is directly related to the purity of the arsenic used. How to improve the product quality of high-purity arsenic and reduce the impurity content is an urgent problem to be solved at present. [0003] In the production of high-purity arsenic, the purity of arsenic trichloride is directly related to the product quality of high-purity arsenic. In the past, the purification of arsenic trichloride generally used a quartz tower. The height of the quartz tower was 2.5-3m, and it was composed of three parts: the ...

AI Technical Summary

Problems solved by technology

[0005] Due to the limitation of quartz glass processing technology, there is limited space to increase the size of the quartz tower and increase the output of arsenic trichloride. The monthly production capacity of a single tower can only reach 100kg of high-purity arsenic

Because the quartz ring in the quartz tower is filled in random piles, it is easy to cause blockage and channeling, which affects the rectification effect of arsenic trichloride. Generally, three rectifications are required to meet the requirements.

[0006] The various parts of the quartz tower are made by welding and are connected with other components through hoses. It is difficult to replace and maintain the interface and components. In addition, manual operation is easy to cause contamination, which reduces the qualified rate of the product to less than 20%; in addition " "jumping kettle" may also cause the rupture of the quartz kettle

Therefore, the quartz distillation column cannot meet the requirements of large-scale preparation of high-purity arsenic

Images