Magnetic recording media and magnetic recording apparatus
一种磁记录介质、磁记录层的技术,应用在磁记录、数据记录、图案记录载体等方向,能够解决表面差平坦度、热波动抵抗性劣化等问题
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[0057] Hereinafter, the present invention will be explained more specifically based on examples.
[0058] DTR media were fabricated using the method of the present invention shown in FIG. 4 .
[0059] As the substrate 41, a lithium-based crystallized glass substrate having a diameter of 1.8 inches was used. After rinsing the substrate 41, it is introduced into a sputtering device, and a soft underlayer, an intermediate layer, and a magnetic layer 42 (perpendicular recording layer) are sequentially formed. A CoZr-based alloy is used for the soft magnetic underlayer, Ru is used for the intermediate layer, and a CoCrPt-based alloy is used for the perpendicular recording layer.
[0060] As the resist 43, SOG (OCD T-7 4000T, Tokyo Ohka Kogyo Co. Ltd.) was spin-coated on the magnetic layer at 5,000 rpm. The thickness of the applied resist was about 60 nm. Then, the resist (SOG) 43 is rinsed in an area of 300 micrometers from the peripheral edge. Cyclohexane was used as a rinse...
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