Nano fluid sensor based on field effect tube
A technology of field effect tube and nanofluid, which is applied in the direction of bioreactor/fermenter combination, specific-purpose bioreactor/fermenter, instrument, etc. It can solve the problems such as difficult detection of electric current, and achieve the goal of improving sensitivity and saving cost Effect
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[0010] In the figure, 1, nano channel, 2, source, 3, drain, 4, left micro channel, 5, FET gate, 6, right micro channel, 7, SiO 2 Insulation layer, 8, highly doped N+ type region or highly doped P+ type region, 9, P-type thin silicon substrate or N-type thin silicon substrate.
[0011] As shown in Figure 1, a nano-channel 1, a left micro-channel 4, and a right micro-channel 6 are arranged on the field effect transistor grid 5, and the left micro-channel 4 and the right micro-channel 6 are respectively connected to the two ends of the nano-channel 1. Positive and negative electrodes are respectively added on the tube grid 5 to form a grid control loop; the resistance of the FET grid 5 control loop is composed of the resistance R of the medium in the nanochannel 1 and the resistance R of the medium in the left micron channel 4 and the right micron channel 6 Resistance R 1 , R 2 Composed in series. The resistance R of the medium in nanochannel 1 is composed of SiO 2 The surfac...
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