Millimeter wave MEMS phase shifter of sawtooth shape coplane wave-guide structure

Abstract

A zigzag coplanar waveguide-structured millimeter-wave MEMS phaser relates to a minimized millimeter-wave phaser, which resolves the problem that the prior MEMS phasers have small single-bridge phase shift and low phase precision. The invention comprises a coplanar waveguide and n metal bridges, the coplanar waveguide is composed of a base plate, a signal wire and two ground wires, the signal wire is fixed on the middle of the upper surface of the base plate, the ground wires are fixed on the two sides of the signal wire at intervals, the metal bridges periodically cross the base body of the coplanar waveguide, and the two ends of each metal bridge are respectively fixed on the ground wires on the coplanar waveguide; the invention also comprises n dielectric substrates, the two sides of the signal wire right under each metal bridge have symmetric zigzag concaving inwards, the dielectric substrates are fixed on the surface of the signal wire corresponding to the zigzag, and the dielectric constant of the dielectric substrates is 2-20 and the thickness t is 0.1Mu m-5Mum. The invention can be widely applied to a radio frequency communication system and a small-sized phased array radar, a phased array antenna system and so on.

Description

technical field [0001] The invention relates to a miniaturized millimeter wave phase shifter. Background technique [0002] The phase shifter is the most important part of the core components in phased array radar, satellite communication, and mobile communication equipment. Its operating frequency band and insertion loss directly affect the anti-interference ability and sensitivity of these equipment, as well as the weight and volume of the system. and cost. In traditional phase shifter circuits, diodes or ferrite devices are often used as the main components of phase shifter circuits, but traditional phase shifters have disadvantages such as high power consumption, high insertion loss, poor reliability, and high cost. Moreover, it is not feasible to use traditional phase shifters to design the feed network of millimeter-wave (such as Ka-band) phased arrays, because the spacing between array elements is on the order of millimeters, which is even smaller than the physical s...

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of small single-bridge phase shift and low phase accuracy in existing MEMS phase shifters, the present invention provides a millimeter-wave MEMS phase shifter with a zigzag coplanar waveguide structure

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