Embedded MENS bioelectrode and preparation technology thereof

Abstract

The invention discloses an embedded MEMS bioelectrode and a preparation technique thereof, which is applied to rehabilitation therapy of neurogenic disease in clinical medicine. An electrode employs MEMS processing technology to prepare a graphical stimulating electrode, a graphical recording electrode and a graphical outlet terminal with a concave pit structure of an electrode circuit at a substrate. A chemical vapor deposition method is employed to grow multiple layers of impermeable insulting layer; a wet etching method is employed to etch the impermeable insulting layer of the stimulating electrode, the recording electrode and the outlet terminal of the electrode circuit; thereby the metallic film of the electrode and the outlet terminal of the electrode is exposed; an electroplating technique is combined to form a thick film structure of the outlet terminal of the electrode circuit and realize a reliable connection with an external conductor. Materials with good biocompatibility are employed to prepare metal and the insulting layer of the electrode, and all parts outside the stimulating electrode and the recording electrode are encapsulated by biological polyurethane after the electrode circuit is connected with the external conductor, thereby the whole electrode is endowed with good biocompatibility, and is suitable for being implanted into the human body for a long time.

Description

technical field [0001] The invention belongs to the field of micro-manufacturing, and in particular relates to a MEMS bioelectrode suitable for implanting into a human body and a preparation method thereof. The electrode is mainly used for long-term implantation treatment of neurological diseases in clinical medicine. Background technique [0002] In clinical medicine, for the treatment of more serious neurological diseases, such as Parkinson's syndrome, optic nerve disorder, hearing nerve disorder, paralysis and severe epilepsy, etc., the most effective way is to surgically repair the patient's brain. The electrodes are implanted in the deep part for a long time, and the battery of the stimulator is used to supply power to the electrodes, and the diseased parts are stimulated for treatment. The stimulating electrodes implanted into the human body clinically are millimeter ring electrodes, such as the series of products produced by Medtronic, which have 4 stimulating electro...

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Problems solved by technology

For example, K.D.Wise et al [Proceedings of the IEEE.92 (2004) 76-96] prepared a Si-based probe neural structure. The Si-based probe-type neural electrode has high strength, but its edge shape is too sharp, only It is suitable for short-term stimulation or use in the human brain cortex, but it will cause tissue damage when implanted in deep brain tissue, and is not suitable for long-term implantation in deep brain; Thomas Stieglitz et al. [Sensors and ActuatorsB.83(2002) 8-14] produced Implantable microelectrodes with flexible substrates are suitable for deep brain implantation and cause little damage to tissues, but are not conducive to surgical operations due to their low strength; in addition, Medtronic’s millimeter ring electrodes and The wires connected to the pulse stimulator are connected by fusion welding metal, which is obviously not suitable for the connection between the thin film electrodes and the wires

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