Dual spindle differential capacitance type micromechanical accelerameter

Abstract

The invention relates to a biaxial differential capacitive micro-accelerometer, which belongs to the field of inertial sensors in a micro-electro-mechanical system. The micro-accelerometer comprises a sensitive mass element composed of a silicon sheet, four square movable electrodes arranged on the silicon sheet and insulating layers for isolating the movable electrodes, a substrate horizontally opposite to the silicon sheet, four square fixed electrodes arranged on the substrate and corresponding to the four square movable electrode, two lateral folding beams arranged on both ends of the silicon sheet for fixing the silicon sheet, two longitudinal folding beams for fixing the lateral folding beams, and pillars for fixing the two longitudinal folding beams on the substrate, so that the planes of the four movable electrodes are suspended and parallel to the substrate. The invention has the advantages of simple structure and high sensitivity, and can achieve high-accuracy two-dimensional acceleration measurement.

Description

technical field [0001] The invention belongs to the field of inertial sensors in micro-electro-mechanical systems (MEMS), in particular to a dual-axis differential capacitive micro-machine accelerometer, which is widely used as a micro-inertial device in the measurement and measurement of motion states of automotive electronics, aerospace, and weaponry. control. Background technique [0002] MEMS is a system that integrates electronic components and mechanical components with sizes ranging from microns to millimeters. It can sense, control, and drive tiny dimensions, and perform specific functions individually or in combination. It has a series of characteristics such as small volume and quality, low cost and energy consumption, high degree of integration and intelligence. As a typical and representative achievement, the micromachined accelerometer based on integrated circuit technology and micromachining technology is characterized by its small size, light weight, low powe...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the disadvantages of elastic support rigidity and excessive cross-coupling in the prior art, and provide a dual-axis differential capacitive micro-machined accelerometer, which is made by plane processing technology, has simple structure, low cost and easy processing. Simple process, strong repeatability, high yield and easy mass production

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