Dual spindle differential capacitance type micromechanical accelerameter

A differential capacitor and accelerometer technology, applied in the field of inertial sensors, can solve the problems of elastic support rigidity and excessive cross-coupling, and achieve the effects of reducing processing costs, improving sensitivity and resolution, and improving processing efficiency

Inactive Publication Date: 2008-07-09
ZIGUANG COMM TECH
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Problems solved by technology

[0006] The purpose of the present invention is to overcome the disadvantages of elastic support rigidity and excessive cross-coupling in the prior art, and provide a dual-axis differential capacitive m

Method used

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  • Dual spindle differential capacitance type micromechanical accelerameter
  • Dual spindle differential capacitance type micromechanical accelerameter

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Embodiment Construction

[0022] A biaxial differential capacitive micromachined accelerometer proposed by the present invention is described in detail in conjunction with the accompanying drawings and embodiments as follows:

[0023] The structure of the present invention is shown in Fig. 2, Fig. 3, Fig. 4, comprises mass block 9, insulating layer 10, movable electrode 11, substrate 12, fixed electrode 13, protruding anti-absorption stopper 14, column 15, Movable electrode leads 16, transverse folded beams 17, longitudinal folded beams 18, convex anti-shock stops 19. The mass block 9 is composed of a silicon wafer as the main body and adopts an overall square shape. A square array composed of four square movable electrodes 11 is arranged in a square array on the silicon wafer. The center of the electrode array coincides with the center of the silicon wafer. The insulating layer 10 is isolated, and the horizontal ends of the mass block 9 are fixed on the longitudinal folding beam 18 to form a longitudi...

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Abstract

The invention relates to a biaxial differential capacitive micro-accelerometer, which belongs to the field of inertial sensors in a micro-electro-mechanical system. The micro-accelerometer comprises a sensitive mass element composed of a silicon sheet, four square movable electrodes arranged on the silicon sheet and insulating layers for isolating the movable electrodes, a substrate horizontally opposite to the silicon sheet, four square fixed electrodes arranged on the substrate and corresponding to the four square movable electrode, two lateral folding beams arranged on both ends of the silicon sheet for fixing the silicon sheet, two longitudinal folding beams for fixing the lateral folding beams, and pillars for fixing the two longitudinal folding beams on the substrate, so that the planes of the four movable electrodes are suspended and parallel to the substrate. The invention has the advantages of simple structure and high sensitivity, and can achieve high-accuracy two-dimensional acceleration measurement.

Description

technical field [0001] The invention belongs to the field of inertial sensors in micro-electro-mechanical systems (MEMS), in particular to a dual-axis differential capacitive micro-machine accelerometer, which is widely used as a micro-inertial device in the measurement and measurement of motion states of automotive electronics, aerospace, and weaponry. control. Background technique [0002] MEMS is a system that integrates electronic components and mechanical components with sizes ranging from microns to millimeters. It can sense, control, and drive tiny dimensions, and perform specific functions individually or in combination. It has a series of characteristics such as small volume and quality, low cost and energy consumption, high degree of integration and intelligence. As a typical and representative achievement, the micromachined accelerometer based on integrated circuit technology and micromachining technology is characterized by its small size, light weight, low powe...

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Application Information

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IPC IPC(8): G01P15/125B81B7/02
Inventor 高宏丁炜毕国楦胡向阳才海南董景新张嵘
Owner ZIGUANG COMM TECH
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