A preparation method for ultra-high density perpendicular magnetic recording medium

Abstract

The invention provides a preparation method used for ultra-high density perpendicular magnetic recording medium. A multilayer film [FePt (5-20) /Au (2.5-7)] 5-10 deposits on a heated MgO (001) single crystal substrate by utilizing the Magnetron Sputtering method. The temperature of the substrate is 100-450 DEG C, background pressure in the sputtering chamber is 1*10<-5>-7*10<-5>Pa, and argon pressure is 0.9-1.6 Pa when sputtering. After deposition, the film is cooled to the room temperature and then put into a vacuum annealing furnace for heat treatment with the annealing temperature is 470-700 DEG C, the annealing time is 20m-4 h, and the background pressure in the annealing furnace is 2*10<-5>-7*10<-5>Pa. The prepared L10-FePt film is characterized in vertically alignment, superior magnetic property and particle size smaller than 10nm, and is suitable for ultra-high density perpendicular magnetic recording medium. The method has the advantages of low cost, easy preparation and suitability for industrial application.

Description

technical field [0001] The invention belongs to the preparation method of ultra-high-density perpendicular magnetic recording medium, and in particular provides a method for preparing L1 with the characteristics of perpendicular film plane orientation, excellent magnetic properties, and particle size less than 10nm. 0 - Method for FePt thin films. Background technique [0002] In the past few decades, information storage technology, especially magnetic recording technology, has developed rapidly, especially the application of spin-valve giant magnetoresistive heads, which has greatly increased the areal recording density of hard disks. For traditional longitudinal magnetic recording hard disks, the increase in areal density will cause a large demagnetization field in the film, so it cannot be applied to information storage with ultra-high areal density. In the perpendicular magnetic recording method, the demagnetization field is along the direction perpendicular to the film...

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Problems solved by technology

Shen et al. used RuAl as the bottom layer to realize a FePt film with a grain size of about 6nm and a vertical orientation (W.K.Shen, J.H.Judy, J.P.Wang.J.Appl.Phys.97, 10H301 (2005)), but this After the film is annealed at low temperature, the magnetic properties of the film are low, and it is difficult to apply to ultra-high-density magnetic recording

Xu et al. used AlN as the matrix of FePt particles to achieve a nanoparticle film with high magnetic properties and small grain size (X.H.Xu, X.L.Li, H.S.Wu.Vaccum 80, 390 (2006)), but this film Does not have perpendicular film plane orientation, not suitable for perpendicular magnetic recording

Therefore, so far, it is difficult to achieve vertical film orientation, excellent magnetic properties after low-temperature annealing, and L1 particles with a particle size of less than 10 nm. 0 -FePt thin film, which is also the key issue to achieve ultra-high density perpendicular magnetic recording

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