Decompression drying device
A technology of decompression drying device and decompression mechanism, which is applied in the directions of drying solid materials, heating to dry solid materials, and drying. Larger and other problems, to achieve the effect of rapid decompression drying treatment and heat treatment, reduced occupied area, and small waste heat
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[0042] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[0043] 1. The overall structure of the vacuum drying device
[0044] Fig. 1 is a longitudinal cross-sectional view showing the configuration of a reduced-pressure drying device 1 according to an embodiment of the present invention. In FIG. 1, the structure of the suction and exhaust system or the drive system connected to the reduced-pressure drying device 1 is also schematically shown. The reduced-pressure drying device 1 is a photolithography process that selectively etches the surface of a square glass substrate (hereinafter referred to as a "substrate") 9 for a liquid crystal display device to reduce the substrate 9 coated with a resist. It is a device for pressure drying treatment and subsequent heating and cooling treatments. As shown in FIG. 1, the reduced-pressure drying device 1 has a chamber 10, a substrate holding part 20, a heating part 30, a cooling p...
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