Transport device in a facility for processing substrates

A technology for transporting devices and processing substrates, applied in the direction of transportation and packaging, conveyors, conveyor objects, etc., can solve problems such as interference sources, and achieve high-yield effects

Inactive Publication Date: 2008-08-13
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Whether the transport involves belts, rails, or any other system, this transfer of substrates from one independent transport system to another is often associated with deviations in positioning accuracy, thus creating a permanent source of disturbance and error in the processing cycle
Furthermore, for unimpeded horizontal linear motion of the substrate, the structure of the transfer device must be designed to accommodate the transport device, which requires considerable space within the vacuum processing module

Method used

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  • Transport device in a facility for processing substrates
  • Transport device in a facility for processing substrates
  • Transport device in a facility for processing substrates

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Embodiment Construction

[0057] In FIG. 1, the vertical in-line coating apparatus according to embodiment A comprises two adjacent coating stations 1 and two adjacent lock chambers 2, wherein the coating stations 1 and the lock chambers 2 are controlled by a vacuum-tight chamber valve 3 to separate from each other. The transport device according to the invention passes through the lock chamber 2 and the coating station 1 , said device being formed by several transport segments 5 arranged in succession along the transport line 4 . The transport sections 5 according to embodiment A are formed for transporting substantially vertically aligned flat substrates 8, wherein, in particular, the transport sections 5 in FIG. Or substantially vertically oriented substrate guide plate 6, and transport rollers 7 are arranged at the base (can be easily seen from Fig. 2a), by means of transport rollers 7, a flat substrate 8 can stand slightly inclined along The transport line 4 transports through the in-line coating...

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Abstract

The invention relates to a transport device in a plant for processing substrates, which transport device has a continuous transport section for the continuous in-line transport of substrates along a transport line through several processing stations, wherein a device for A transfer device that positions each substrate to a fixed processing position. The object of the present invention is to improve the functioning of the transport device of the conventional method in order to ensure a shortened cycle time. This object is achieved with a transfer device (9) having at least two matching mobile combination segments (10) by means of which the substrates (8) can be positioned, wherein alternately assigned to the transport The combined section (10) of the line (4) forms a transport section (5).

Description

technical field [0001] The invention relates to a transport device in a plant for processing substrates, which transport device has a continuous transport section for the continuous in-line transport of substrates along a transport line through several processing stations, wherein a device for A transfer device that positions each substrate to a fixed processing location. Background technique [0002] Such transport means can be found in plants for processing substrates in several successive processing stations, for example in vacuum coating plants for multilayer coatings such as special glass. These devices include an in-line arrangement, ie different coating stations in series, wherein the substrate is transported from one coating station to the next by means of a transport device. Corresponding to the structural sequence of the coating process in the coating station, various multilayer layer systems of different materials and thicknesses are applied by evaporation or spu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/56
CPCC23C14/568B65G49/061B65G49/063B65G49/064B65G49/067B65G2249/02C23C16/54
Inventor W-E·弗里齐
Owner APPLIED MATERIALS INC
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