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Immune body detecting biochip using piezo-electricity thin film acoustic wave device

A technology of bulk acoustic wave devices and piezoelectric films, which is applied in the analysis of solids, biological tests, and material inspection products using sonic/ultrasonic/infrasonic waves, which can solve the problems of small sensing area and unreported biosensors.

Inactive Publication Date: 2008-08-20
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0010] (6) Since FBAR can be integrated in a semiconductor process, its sensing area is very small (micron order) and
However, the use of FBAR for biological detection has not been reported yet, and FBAR biosensors based on AlN and Mo have not been reported.

Method used

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  • Immune body detecting biochip using piezo-electricity thin film acoustic wave device

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Embodiment Construction

[0025] With reference to Fig. 2, Fig. 3; The present invention comprises resonator FBAR, is provided with upper electrode 3, lower electrode 5 and Bragg reflection layer total reflection film on (100) monocrystalline silicon chip 14 of resonator FBAR, described Bragg reflection layer The total reflection film includes high acoustic impedance 5, 7, 9 and low acoustic impedance 6, 8, 10, the high acoustic impedance 5, 7, 9 is made of metal Mo, and the low acoustic impedance 6, 8, 10 is made of metal Al; each layer The thickness is a quarter wavelength, and the high and low acoustic impedance layers are sequentially deposited on the silicon wafer 14 of the FBAR according to alternating DC sputtering. The number of layers of the high and low acoustic impedance layers is generally 3-7 layers; the resonator A piezoelectric film 4 is provided between the upper electrode 3 and the lower electrode 5 on the FBAR. The working frequency of the FBAR is 0.1-10GHz, and the Q value range is 10...

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Abstract

The invention belongs to the field of antibody detecting biochip which is based on piezoelectric effect, especially relates to a antibody detecting biochip using piezoelectric film acoustic wave device; including resonator FBAR which is equipped with upper electrode, bottom electrode and bragg reflection layer whole reflection film, the character of it resides in that: the piezoelectric film is equipped between the upper electrode and bottom electrode on resonator, the bragg reflection layer whole reflection film includes loudness acoustic impedance and undertone impedance, the loudness is composed of metal Mo, the undertone is composed of metal Al; the FRAB working frequency is 0.1-10GHz, the range of Q value is 100-2000; metal layer is planted on upper electrode, protein and antibody tissue are attached on the metal layer; the invention can measure resonance frequency migration parameters of antibody tissue and antigen, then specific antigen content is obtained; the sensor can be integrated on the chip, at the same time can sense micro antibody material, and creates favorable conditions for measuring trace amount of biological materials in body fluid.

Description

technical field [0001] The invention belongs to an antibody detection biochip based on piezoelectric effect, in particular to an antibody detection biochip using a piezoelectric film bulk acoustic wave device. Background technique [0002] Piezoelectric sensors are widely used in biological detection. The sensing principle is that the piezoelectric body of the piezoelectric sensor works in a resonant state. When a mass load is deposited on the surface of the vibrating body, its resonant frequency will drift. Through calculation, it can To obtain the mass of the deposited material, its sensing sensitivity mainly depends on the working frequency and the quality factor Q. At present, such sensors mainly include: SAW sensors based on surface acoustic waves and BAW sensors based on bulk acoustic waves. SAW sensors use interdigitated electrodes to emit and receive surface acoustic waves for sensing, which are convenient for signal conversion and processing, but they are too large...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/53G01N29/12
Inventor 董树荣韩雁赵士恒程维维王德苗李侃
Owner ZHEJIANG UNIV
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