Radio frequency micro electromechanical system switch of bistable monocrystaline silicon beam

A micro-electromechanical system, bistable technology, applied in the field of radio frequency MEMS, to achieve the effects of steady-state power consumption, maintaining power consumption, and reducing power consumption

Active Publication Date: 2008-10-01
新疆中科丝路物联科技有限公司
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Problems solved by technology

[0008] In view of this, an object of the present invention is to provide a bistable single crystal silicon beam radio frequency micro-electromechanical system switch,...

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  • Radio frequency micro electromechanical system switch of bistable monocrystaline silicon beam
  • Radio frequency micro electromechanical system switch of bistable monocrystaline silicon beam
  • Radio frequency micro electromechanical system switch of bistable monocrystaline silicon beam

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Embodiment Construction

[0047] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0048] This bistable single crystal silicon beam RF MEMS switch provided by the present invention is based on figure 1 , figure 2 with image 3 The traditional nickel-iron single-arm beam electromagnetically driven switch shown is based on the realization principle, but the innovative structure adopted solves the problems of the traditional nickel-iron single-arm beam due to internal stress bending deformation, insufficient restoring force of the single-arm beam and short service life of the switch , while reducing power consumption.

[0049] Such as Figure 4 as shown, Figure 4 Schematic diagram of the structure of the bistable single crystal silicon beam RF MEMS switch provided by the present invention, the RF MEM...

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Abstract

The invention relates to the technical field of radio frequency electromechanical system, and discloses a bistable mono-crystal silicon beam radio frequency micro-electromechanical system switch, the radio frequency micro-electromechanical system switch comprises an electromagnetic drive portion and a cantilever beam movable portion that are combined together in a manner of alignment bonding; the electromagnetic drive portion includes an iron core iron shell and a permanent magnet, and changes the direction of entire magnetic field by adding the magnetic field generated by current and the magnetic field of the permanent magnet into planar coil such that the cantilever beam movable portion moves to realize the connection and disconnection of contacts. By using the invention, the radio frequency micro-electromechanical system switch has low working voltage, large driving force, high working times, low energy consumption, small contact resistance, high isolation degree and simple control circuit, which is suitable for the radio frequency communication circuit with large power.

Description

technical field [0001] The invention relates to the technical field of radio frequency (RF) MEMS in microelectromechanical system (MEMS) application in microelectronic technology, in particular to a bistable single crystal silicon beam radio frequency MEMS switch. Background technique [0002] In MEMS manufacturing technology, radio frequency MEMS (RF MEMS) switch is a miniaturized mechanical device made by photolithography technology, which is used for signal processing in radio frequency and microwave frequency circuits. New technologies that have a major impact on radio frequency structures in communications. [0003] At present, in the main research fields of RF MEMS technology, there are tuning capacitors, inductors, filters and micromechanical switches suitable for RF systems. Among the most common RF MEMS control components, microwave transmission line switches are considered core devices. The RF MEMS switch is different from the electronically controlled switch (PI...

Claims

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Application Information

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IPC IPC(8): H01H51/01H01H51/22
Inventor 李全宝景玉鹏陈大鹏欧毅叶甜春
Owner 新疆中科丝路物联科技有限公司
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