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Two-sided reflection movable mirror interferometer

A double-sided reflection and interferometer technology is applied in the field of interferometers to achieve the effects of improving mechanical stability and thermal stability, low cost and compact structure

Inactive Publication Date: 2008-12-10
杨庆华
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a double-sided reflecting moving mirror interferometer, which solves the technical problems of plane moving mirror tilting, single scanning cat glasses and single scanning angle reflector traversing in the background technology, and the optical path difference is double-sided reflection Four times of the moving mirror displacement (relative to its zero optical path difference position), the accuracy is greatly improved compared with the Michelson interferometer in the application of the Fourier transform spectrometer; under the same conditions of manufacturing error and motion error, it can be Gain higher instrument resolution

Method used

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Embodiment approach 1

[0027] Embodiment 1: The beam splitter is set on the optical path of the incident beam at an angle of 45 degrees. The beam splitter is two glued plane parallel glass plates, and one surface of the glued surface is the semi-reflective surface of the beam splitter; the first plane mirror and the second The included angles between the plane mirror and the semi-reflecting surface of the beam splitter are both 22.5 degrees.

Embodiment approach 2

[0028] Embodiment 2: the beam splitter is two glued right-angle prisms, the slope of the right-angle prism is the glued surface, and one surface of the glued surface is the semi-reflective surface of the beam splitter; the first plane mirror and the second plane mirror are connected with the semi-reflective surface of the beam splitter The included angles are both 22.5 degrees.

Embodiment approach 3

[0029] Embodiment 3: The beam splitter is set on the incident beam optical path at an angle of 30 degrees. The beam splitter is two glued plane parallel glass plates, and one surface of the glued surface is the semi-reflective surface of the beam splitter; the first plane mirror and the second The included angles between the plane mirror and the semi-reflecting surface of the beam splitter are both 30 degrees.

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Abstract

A double-sided movable reflecting mirror interferometer comprises a beam splitter, two fixed plane mirrors and a double-sided movable reflecting mirror which is a plane parallel glass sheet, and both sides of the glass sheet are plated with reflecting film; the double-sided movable reflecting mirror is parallel to the half-reflection surface of the beam splitter; a first plane mirror and a second plane mirror are symmetrical to the half-reflection surface of the beam splitter; the double-sided movable reflecting mirror makes straight reciprocating motion along the normal direction of the half-reflection surface of the beam splitter; the optical path difference is four times longer than the displacement (relative to the position of zero optical path difference) of the double-sided movable reflecting mirror. The interferometer has compact structure, small volume and low cost, and is suitable for high resolution Fourier transform spectrometers of various spectral regions.

Description

technical field [0001] The invention relates to an interferometer, in particular to a double-sided reflective moving mirror interferometer applied to a high-resolution Fourier transform spectrometer. Background technique [0002] Fourier transform spectrometers have the advantages of high spectral resolution, high throughput, and multiple channels. The biggest problem affecting the application of Michelson interferometers in Fourier transform spectrometers is the tilt of the plane moving mirror during scanning. [0003] Using cat's-eye retroreflectors or cube-corner mirrors instead of planar moving mirrors can solve the tilt problem very well, the only disadvantage is that there is a lateral offset problem with a single cat's-eye retroreflector or a single scanning corner mirror . Another approach is to use a dynamic correction servo system, but the higher the resolution, the higher the probability of failure of this correction system, and the system is very sensitive to di...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B17/08G01J3/26
Inventor 杨庆华
Owner 杨庆华
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