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Method for preparing pixel structure

A manufacturing method and technology of pixel structure, which are applied in semiconductor/solid-state device manufacturing, optics, instruments, etc., can solve the problems of high production cost, complicated steps, and inability to reduce the manufacturing cost of pixel structure, so as to save material usage and reduce manufacturing cost effect

Active Publication Date: 2010-12-08
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0007] Based on the above, the known method of fabricating the color filter layer on the thin film transistor array requires at least seven photolithography and etching processes, and the steps are complicated and require high production costs.
In addition, the above-mentioned pixel structure requiring at least seven photolithography and etching processes needs to use multiple masks with different patterns. Since the mask is very expensive, the manufacturing cost of the pixel structure will not be reduced.

Method used

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  • Method for preparing pixel structure
  • Method for preparing pixel structure
  • Method for preparing pixel structure

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Embodiment Construction

[0055] In order to make the above-mentioned features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.

[0056] Figure 2A ~ Figure 2G It is a schematic flowchart of a manufacturing method of a pixel structure of the present invention. Please refer to Figure 2A Firstly, a substrate 202 is provided, and the material of the substrate 202 is, for example, hard or soft materials such as glass and plastic. Next, form the gate 212 on the substrate 202, wherein the method of forming the gate 212 can be before forming a conductive layer (not shown) on the substrate 202, and the method of forming the conductive layer is, for example, sputtering (sputtering), Evaporation or other thin film deposition techniques. Afterwards, the conductive layer (not shown) is patterned to form the gate 212 . The above-mentioned patterning of the conductive layer is, for example, performed by ...

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Abstract

The invention provides a method for manufacturing a pixel structure. The method comprises the following steps: firstly, a grid is formed on a base plate. Then a grid insulation layer is formed on a base plate so as to cover the grid; in addition, a channel layer, a source electrode and a drain electrode are formed on the grid insulation layer on the grid simultaneously, wherein, the grid, the channel layer, the source electrode and the drain electrode compose a thin film transistor. A protection layer is formed on the thin film transistor and the grid insulation layer; a black matrix is formed on the protection layer, wherein, the black matrix is provided with a contact opening above the drain electrode and a color filtering layer holding opening. Then a color filtering layer is formed inthe color filtering layer holding opening by an ink-jet printing process; a dielectric layer is formed on the black matrix and the color filtering layer. Then the dielectric layer and the protection layer are patterned so as to expose the drain electrode. Then a pixel electrode electrically connected with the drain electrode is formed.

Description

technical field [0001] The present invention relates to a method for fabricating a pixel structure, and more particularly to a method for fabricating a pixel structure with a color filter layer using less photolithography and etching process (PEP). Background technique [0002] Liquid crystal displays have the advantages of high image quality, small size, light weight, low voltage drive, low power consumption, and wide application range. Therefore, they have replaced cathode ray tubes (Cathode Ray Tube, CRT) and become the mainstream of the new generation of displays. A traditional liquid crystal display panel is composed of a color filter substrate with a color filter layer, a thin film transistor array substrate (TFT Array Substrate), and a liquid crystal layer arranged between the two substrates. In order to improve the resolution of the panel and the aperture ratio of the pixels, and to avoid alignment errors when the color filter substrate and the TFT array substrate ar...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/84H01L27/12G02F1/1362
Inventor 廖达文童振邦张家铭张宗隆赖哲永江俊毅余宙桓萧祥志周汉唐张峻恺
Owner AU OPTRONICS CORP