Method for preparing ALON protection film for optical element

A technology for optical components and protective films, applied in the field of preparation of AlON protective films for optical components, can solve the problems of opaque application range, large absorption, and large stress in the visible light band, and achieve high transmittance, low absorption coefficient, and mechanical strength. high effect
CN101349769AInactive Publication Date: 2009-01-21GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG +1
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
Publication Date
2009-01-21
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention relates to a preparation method of AION protective films for optical elements, belonging to the film preparation technical field, which uses high-purity metal AI as target, Ar gas as working gas, N2 and O2 gas as reaction gas, uses reaction magnetic control splash technique to prepare AION films. The AION film has high transmittance and low absorption factor in wide waveband of 0.2 to 12um, high mechanical strength, rigidity, abrasion resistance, high chemical stability and corrosion resistance, which is suitable for the use as rigid protective film of military optical windows and the uses as moisture proof protective film and abrasion resistant film for general optical elements as prisms and lens.
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Description

technical field

[0001] The invention belongs to the technical field of film preparation, and in particular relates to a preparation method of an AlON protective film for an optical element. Background technique

[0002] ZnSe, ZnS, Ge and other materials have low hardness, so the optical components made of these materials are easily damaged in the working environment and affect normal work, while prisms and windows made of KCl plasma crystals are easily deliquescent in the atmosphere , so it is necessary to coat the surface with a protective film to ensure normal use.

[0003] An ideal optical protective film should not only have optical properties such as visible, near-infrared, mid-infrared, and far-infrared multi-band transparency and small absorption coefficient, but also have high mechanical strength, high hardness, wear resistance, good chemical stability, and Corrosion and other characteristics. DLC, Ge 1-x C x Film is a commonly used protective film for optical co...

Claims

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