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Method of processing glass base and rinse composition for glass base processing

A glass substrate and processing method technology, applied in the field of rinsing agent composition, can solve the problems of inability to remove abrasive particles, large particle size of magnesium hydroxide, increase in the number of processing machines, etc., to reduce load, reduce the amount of scars, improve quality effect

Active Publication Date: 2011-05-18
RESONAC CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this method, since it is necessary to re-grind the polished product, there is a problem that the number of processing machines required increases.
In addition, in the example of Patent Document 6, there is the following problem: the particle size of magnesium hydroxide is large, the particles settle inside the grinder, and when it is used as a rinse agent, it is easy to be mixed into the cerium oxide-based abrasive material.
It is suggested in Patent Document 8 that a glass substrate with less dark spots can be obtained by using this abrasive, but this abrasive cannot remove abrasive particles adhering to the glass substrate.

Method used

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  • Method of processing glass base and rinse composition for glass base processing
  • Method of processing glass base and rinse composition for glass base processing
  • Method of processing glass base and rinse composition for glass base processing

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0103] (Preparation of Slurry for Polishing)

[0104] A cerium oxide-based abrasive was mixed with water and a commercially available dispersant, and the abrasive was dispersed in water to prepare a polishing slurry 1 with an abrasive concentration of 5%.

[0105] (Preparation of rinse composition)

[0106] Magnesium chloride hexahydrate (manufactured by Ako Kasei) was dissolved in water to prepare a magnesium chloride aqueous solution (liquid A) having a concentration of 280 mmol / L.

[0107] On the other hand, 25% aqueous sodium hydroxide solution and sodium bicarbonate anhydrous (manufactured by Asahi Glass) were dissolved in water to prepare a mixed aqueous solution (liquid B) of sodium hydroxide with a concentration of 420 mmol / L and sodium bicarbonate with a concentration of 140 mmol / L. .

[0108] After dissolving 100 mL of A liquid in 19.8 L of pure water, 100 mL of B liquid was slowly added thereto, stirring, and the rinse composition 1 was prepared.

[0109] (grindi...

Embodiment 2～5

[0132] A predetermined amount of liquid A and liquid B prepared in Example 1 were added to pure water to prepare rinse agent compositions 2 to 5 of the formulations shown in Table 1. The same material as in Example 1 was used for the polishing slurry, and a processing test was performed in the same manner as in Example 1. The evaluation results are shown in Table 1.

Embodiment 6

[0134] 33.8 g of magnesium sulfate anhydrous salt (manufactured by Kanto Chemical Industry Co., Ltd.) was dissolved in water so that the total amount was 19 L. 1 L of liquid B prepared in Example 1 was mixed with this aqueous solution, and rinse composition 6 was prepared. The same material as that of Example 1 was used for the polishing slurry, and a processing test was carried out in the same manner as in Example 1. The evaluation results are shown in Table 1.

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Abstract

A method of glass base processing which comprises a step in which a glass base is polished with an abrasive material such as cerium oxide and a step in which the glass base is rinsed while supplying thereto a rinse composition having a pH of 7-12 which comprises (1) an aqueous solution of a water-soluble magnesium compound, (2) an aqueous solution of a water-soluble magnesium compound and of at least one member selected from the group consisting of alkali metal hydroxides, alkali metal carbonates, and alkali metal hydrogen carbonates, or (3) a suspension containing colloidal particles and obtained by reacting in water a water-soluble magnesium compound with at least one member selected from the group consisting of alkali metal hydroxides, alkali metal carbonates, and alkali metal hydrogencarbonates. By the glass base processing method, a glass base extremely reduced in surface roughness can be obtained.

Description

technical field [0001] The present invention relates to a method for processing a glass substrate that can efficiently remove abrasive materials and grinding debris adhering to the surface of a glass substrate that has been ground with abrasive materials such as cerium oxide and colloidal silicon dioxide, and reduce the surface roughness of the polished surface, and A rinse composition used in the method. [0002] This application claims priority to Patent Application No. 2006-111934 filed in Japan on April 14, 2006, and the content thereof is incorporated into the present specification. Background technique [0003] In glass grinding, abrasive materials such as cerium oxide, zirconia, iron oxide, and colloidal silica have been used for a long time, but at present, in order to obtain high processing speed and high-quality grinding surface, cerium oxide is mainly used as the main component. The abrasive composition (hereinafter referred to as cerium oxide abrasive material)....

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03C23/00C03C19/00B24B37/00G11B5/84B08B3/08
CPCG11B5/8404C03C19/00C03C23/0075
Inventor 水上洋
Owner RESONAC CORPORATION