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Spin coating production method of love wave sensor PMMA wave-guide membrane

A sensor and waveguide technology, which is applied in the field of preparation of PMMA waveguide films for Love wave sensors, can solve the problems of poor internal uniformity, many defects, and difficulty in obtaining, and achieves good flatness and uniformity, good flatness and uniformity, Moderately volatile effect

Inactive Publication Date: 2009-04-22
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the film spin-coated with the above-mentioned high-concentration and high-viscosity PMMA solution is difficult to obtain high surface flatness due to the poor fluidity of the solution, and the internal uniformity is also poor and there are many defects, resulting in the insertion loss of the sensor increasing with the thickness of the waveguide. while rapidly increasing
And solvents such as chlorobenzene are also toxic

Method used

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  • Spin coating production method of love wave sensor PMMA wave-guide membrane
  • Spin coating production method of love wave sensor PMMA wave-guide membrane
  • Spin coating production method of love wave sensor PMMA wave-guide membrane

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Embodiment Construction

[0015] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0016] The spin-coating preparation method of a kind of Love wave sensor polymethyl methacrylate (PMMA) waveguide film provided by the present invention is as follows (example):

[0017] The surface shallow body wave (SSBW) device is self-made in the laboratory, the piezoelectric chip is made of ST quartz, the interdigitated electrode (IDT) is made of an aluminum electrode with a double-terminal resonant structure, and then the PMMA waveguide is spin-coated on it to complete the Love wave device. preparation. The molecular weight of the PMMA raw material is 35,000, and 1,2-dichloroethane is used as a solvent to prepare a solution with a concentration of 4 wt%, and then spin-coat it on the SSBW device at a speed of 2,000 rpm for 180 s. According to the required thickness, repeat the spin coating several times, and then cure at 180°C for 120 minutes to o...

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Abstract

The invention discloses a spin coating preparation method for a love wave sensor PMMA wave guide film, which is characterized by using 1, 2-ethylene dichloride as solvent to prepare PMMA solution with the concentration of between 1 and 5 weight percent, and reaching the required wave guide thickness through spin coating for multiple times. Because in the spin coating preparation method, the 1, 2-ethylene dichloride with moderate volatility is adopted as the solvent to prepare the spin coating solution with low concentration, and the solution has good flowing property and moderate viscosity, the spin coating preparation method ensures that the wave guide film has good flatness and evenness, and reduces inserted damage to the sensor. Though the thickness of each spin coating is thin, the thickness of the wave guide layer after spin coating for multiple times can reach more than 2 mu m, and can keep good flatness and evenness.

Description

technical field [0001] The invention relates to the technical field of surface acoustic waves, in particular to a method for preparing a PMMA waveguide film of a Love wave sensor. Background technique [0002] Among all ultrasonic sensors, the Love wave sensor has the highest sensitivity and can also be used in a liquid environment, so it is a very promising surface acoustic wave sensor. The Love wave sensor is composed of four layers: piezoelectric wafer-interdigital electrode (IDT)-waveguide-sensitive film, in which the waveguide has a great influence on the sensitivity and insertion loss of the Love wave sensor. [0003] According to the theoretical model of the Love wave sensor (see ① Wang Z, Cheeke J D N, Jen C K. Sensitivity analysis for Love mode acoustic gravimetric sensors, Appl Phys lett, 64 (22) (1994) 2940-2942; ② McHale G, Newton M I, Martin F, Theoretical masssensitivity of Love wave and layer guided acoustic plate mode sensors, J Appl Phys, 91 (2002) 9701-971...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D1/36B05D7/24
Inventor 蒋亚东杜晓松胡佳
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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